Références bibliographiques
Transcription
Références bibliographiques
163 Références bibliographiques Références bibliographiques Introduction 1- 2- 3- 45678- CRAZZOLARA, H. , VON MÜNCH, W. and NÄGELE, M. Silicon pressure sensor with integrated bias stabilization and temperature compensation. Sensors and Actuators, 1992, Vol. A 30, p. 241-247. TANIGAWA, Hiroshi, ISHIHARA, Tsutomu, HIRATA, Masaki and SUZUKI, Kenichiro. MOS integrated silicon pressure sensor. IEEE Transactions on Electron Devices, 1985, Vol. ED-32, N° 7, p. 1191-1195. CANE, C. , CAMPABADAL, F. , ESTEVE, J. , LOZANO, M. , GÖTZ, A. , SANTANDER, J. , BURRER, Ch. , PLAZA, J. A. , PAHUN, L. and MARCO, S. A technology for the monolithic fabrication of a pressure sensor and related circuitry. Sensors and Actuators, 1995, Vol. A 46-47, p. 133-136. RISTIC, L. and ROOP, R. Sensing the real world. In : Sensor technology and devices. Edited by L. Ristic. Boston : Artech House, 1994. p.1-11. MIDDELHOEK, S. Quo vadis silicon sensors ? Sensors and Actuators, 1994, Vol. A 41-42, p. 1-8. 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Sensors and Actuators, 1994, Vol. A 41-42, p. 368-374. 174 Références bibliographiques Publications et communications scientifiques Revue : Micro-Raman study of thermoelastic stress distribution in oxidized silicon membranes and correlation with finite element modeling. GUYOT, Y. , MALHAIRE, C. , LE BERRE, M. , CHAMPAGNON, B. , SIBAI, A. , BUSTARRET, E. et BARBIER, D. Materials Science and Engineering, 1997, Vol. B46, p. 24-28. Congrès avec actes et comité de lecture : Présentation de deux articles au Congrès International MRS de Boston en décembre 1996 (Symposium « Materials for Mechanical & Optical Microsystems ») : Micro-Raman study of stress distribution and thermal relaxation of oxidized silicon membranes. MALHAIRE, C. , GUYOT, Y. , LE BERRE, M. , CHAMPAGNON, B. , SIBAI, A. et BARBIER, D. Material Reasearch Society Proceedings, 1997, Vol. 444, p. 179-184. Effect of thermoelastic stress on the pressure response of a composite SiO2/Si membrane. MALHAIRE, C. , LE BERRE, M. et BARBIER, D. Material Reasearch Society Proceedings, 1997, Vol. 444, p. 137-142. Congrès avec actes : Modélisation simplifiée du comportement mécanique d’un microcapteur de pression. CHOUAF, A. , DUPEUX, M. , MALHAIRE, C. , LE BERRE, M. , TERRIEZ, J. M. , POURROY, F. , MLIHATOUATI, M. 3ème Congrès de Mécanique, 22-25 avril 1997, Faculté des Sciences de Tétouan. Société Marocaine des Sciences Mécaniques.