INSTITUT NEEL Grenoble

INSTITUT NEEL Grenoble
Proposition de stage Master 2 - Année universitaire 2011-2012
Patterned hard magnetic films for prototype magnetic micro-systems
Cadre général
Hard magnetic materials have many potential applications in magnetic micro-systems (actuators,
switches, sensors, levitation devices...). Despite very favourable down-scaling laws, the development
of such systems has been hindered by the challenge of integrating high-quality magnets using
techniques compatible with today’s MEMS technologies. High quality thick hard magnetic films
(NdFeB, SmCo, FePt) are being produced on Si substrates using an original high rate triode sputtering
system at Institut Néel. The use of these films in actual systems requires their lateral structuring at the
micron scale and two complementary patterning techniques are being studied; topographic patterning,
which exploits established micro-fabrication techniques (lithography + etching) and thermo-magnetic
patterning, which exploits the temperature dependence of hard magnetic materials. The former
technique has been found to influence the structural, magnetic and mechanical properties of the hard
magnetic films. The study and optimisation of these properties is needed to prepare prototypes and to
establish the full potential of these materials for application in magnetic micro-systems.
SEM image of the cross section of a NdFeB film deposited on a patterned Si wafer.
Sujet exact, moyens disponibles
The subject of this training period is the preparation, characterisation and optimisation of
topographically patterned hard magnetic films. Micro-machining of both the substrate and the
magnetic film will be studied. Structural characterisation will be carried out using x-ray diffraction
and electron microscopy while the magnetic properties of the films will be studied using VSM /
SQUID magnetometry and magneto-optic microscopy. The magnetic and mechanical properties of the
micro-magnets will be optimised through a variation of patterning parameters, sputtering conditions
and thermal processing of the films. Prototype systems will be developed for bio-applications.
Interactions et collaborations éventuelles, y compris les ouvertures internationales potentielles ou
réelles à la suite ou dans le cadre des collaborations
This work will be carried out in the framework of a number of on-going internal and external
collaborations.
Ce stage pourra se poursuivre par une thèse. This project could be followed up with a PhD thesis
dealing with the development of prototype magnetic micro-systems.
Formation / Compétences : Physics, Materials Science, Magnetism
Période envisagée pour le début du stage :
fev/mars 2012
Contact : Nora Dempsey / Frédéric Dumas-Bouchiat
Laboratoire actuel Institut Néel tél 0476887435
mel [email protected] / [email protected]
plus d'information sur : http://neel.cnrs.fr