Tutorial Silicon Thin Film Transistors on Transparent and

Tutorial
Silicon Thin Film Transistors on Transparent and
Flexible Substrate
Purpose
Today many works are devoted to produce flexible electronics. Major perspectives are flat and flexible
screens, intelligent textiles and clothes, RFID labels able to replace the barcode identification system, and
some biological applications such as bio-patches dedicated to be stuck on organs. The main goal of this
training is to learn how to process on such flexible substrates. In that way, the practice consists in fabricating
on flexible substrate and characterizing thin film transistor (TFT) that is the elementary element of any
electronics.
Practice
The training starts with 4 hours lecture on the functioning of MOSFETs and
particularly here the effect of floating substrate. Then, the technological steps
regarding the low temperature need and on the expected influence of the
flexibility of the substrate on the TFT’s properties are presented.
After that, the practical training starts. TFTs are processed in clean room,
directly on transparent plastic substrate at a maximum temperature of 180°C,
compatible with the mechanical properties of the substrate. The training is
divided in several technological and analysis parts listed below :
 PECVD Deposition : undoped microcrystalline silicon, N or P doped
microcrystalline silicon, silicon nitride
 E-beam deposition of metals
 4 photolithography steps (4 mask levels)
 Electrical and Physical characterizations during the process:
ellipsometry, 4-probes resistivity, I-V and C-V characteristics
 Electrical characterizations after the processs :
TFT’s parameters analysis (Agilent B1500)
Study of the effect of the flexibility of the substrate
Duration, Start-End Time
1 week (5 full days, 8 hours per day) from June
Pr. Tayeb MOHAMMED-BRAHIM
16th to June 20th, 2014.
UNIVERSITÉ DE RENNES 1
CAMPUS DE BEAULIEU (case 1103)
263 AV. DU GÉNÉRAL LECLERC
CS 74205
35042 RENNES CEDEX
TÉL. +33 2 23 23 60 69
FAX +33 2 23 23 56 57
[email protected]
www.ietr.fr
Target and Maximal Audience
The course is primarily aimed to PhD students and researchers from European Universities and Research
Institutes who want to learn or increase their skills on the microelectronic technology on flexible substrate.
Professionals from European Companies that have the same need are also welcome. Due to the limiting
possibilities in the clean room, the maximal audience is limited to a minimum of 4 attendees and a maximum
of 8 attendees.
Required skills
Some knowledge on the physics of semiconductors and on microelectronics is welcome.
Location
The course will be held at IETR.
IETR (Institute of Electronics and Telecommunications of Rennes) brings together the research teams in
electronics and telecommunications located in Rennes 1 University and in engineering high schools, INSA Rennes
and Ecole Superieure d’Electricite Rennes. The Institute is also a research unit of CNRS (UMR 6164). IETR is
involved in the present tutorial through its Microelectronic and Microsensors Department. Microelectronic and
Microsensors Department has a long experience, more than 20 years, in large area electronics on low temperature
substrates. Thin Film Transistors were realized using the different technologies which appear in the last 20 years.
IETR is located in the beautiful “Campus de
Beaulieu” in the city of Rennes. The city with
the old name of Condate was built at the
confluent of the Ille and Vilaine rivers in the first
century B.C. It is now the capital of Brittany
region with more than 200 000 population. The
city is a great college town with two universities
and more than 50 000 students (a quarter of the
population). Cultural life is intense with three
festivals and many other activities.
The Duchesne tower and wall
Place Sainte-Anne
The tutorial will take place at :
IETR
Bâtiment 11D
Avenue Jean Perrin
Campus de Beaulieu
35042 Rennes Cedex
Campus de Beaulieu
Fees and Registration
Attendance is kept low in order to lower the barrier for members of universities and research institutes.
However, a fee will be required to cover a small part of the known high cost of the technology.
 Attendance fee : 1 000 € for PhD students.
 Fees exclude VAT which will be invoiced subject to national regulations.
 Fees include the lecture and the attendance to the training in the clean room, all the materials needed for
the lecture and the training, the five days lunches and refreshment breaks, and the social event dinner.
Pr. Tayeb MOHAMMED-BRAHIM
UNIVERSITÉ DE RENNES 1
CAMPUS DE BEAULIEU (case 1103)
263 AV. DU GÉNÉRAL LECLERC
CS 74205
35042 RENNES CEDEX
TÉL. +33 2 23 23 60 69
FAX +33 2 23 23 56 57
[email protected]
www.ietr.fr
 Fees include also a help for lodging arrangements in the University at moderate cost.
 Transport, accommodation and other meals are not included in the fees.
Registration
All the details on the registration and application for scholarship can be found in
http://www.eurodots.org/Courses-34.asp
Interested people can contact for more details :
Fabienne Jegousse
CCMO
Bâtiment 11B, Campus de Beaulieu
35042 Rennes Cedex
France
Email: [email protected]
Phone : +33 2 23 23 60 69
Registration deadline : May 12th, 2014
Application for lodging arrangements in the University have to be sent to :
Fabienne Jegousse
CCMO
Bâtiment 11B, Campus de Beaulieu
F-35042 Rennes Cedex
France
Email: [email protected]
Phone : +33 2 23 23 60 69
People not interested by lodging in the University have to make their own accommodation. A list of hotels
with good access to IETR is given here :
Hôtel LE VICTORIA **
35 avenue Janvier – RENNES
Tel. +33 2 99 31 69 11 – FAX +33 2 99 31 40 11 - http://www.hotel-levictoria.com/
Hôtel IBIS Rennes Beaulieu **
Rue de Rennes – CESSON SEVIGNE
Tel. +33 2 23 45 63 63 – FAX +33 2 99 83 93 25
http://www.ibishotel.com/fr/hotel-0689-ibis-rennes-beaulieu/index.shtml
Hôtel CAMPANILE Rennes Atalante **
Rue Antoine de Bacquerel – Atalente Beaulieu – RENNES
Tel. +33 2 99 38 37 27 – FAX +33 2 99 38 27 93
http://www.campanile-rennes-est-atalante.fr/fr/index.aspx
Pr. Tayeb MOHAMMED-BRAHIM
UNIVERSITÉ DE RENNES 1
CAMPUS DE BEAULIEU (case 1103)
263 AV. DU GÉNÉRAL LECLERC
CS 74205
35042 RENNES CEDEX
TÉL. +33 2 23 23 60 69
FAX +33 2 23 23 56 57
[email protected]
www.ietr.fr