INSTITUT NEEL Grenoble
Transcription
INSTITUT NEEL Grenoble
INSTITUT NEEL Grenoble Proposition de stage Master 2 - Année universitaire 2011-2012 Patterned hard magnetic films for prototype magnetic micro-systems Cadre général Hard magnetic materials have many potential applications in magnetic micro-systems (actuators, switches, sensors, levitation devices...). Despite very favourable down-scaling laws, the development of such systems has been hindered by the challenge of integrating high-quality magnets using techniques compatible with today’s MEMS technologies. High quality thick hard magnetic films (NdFeB, SmCo, FePt) are being produced on Si substrates using an original high rate triode sputtering system at Institut Néel. The use of these films in actual systems requires their lateral structuring at the micron scale and two complementary patterning techniques are being studied; topographic patterning, which exploits established micro-fabrication techniques (lithography + etching) and thermo-magnetic patterning, which exploits the temperature dependence of hard magnetic materials. The former technique has been found to influence the structural, magnetic and mechanical properties of the hard magnetic films. The study and optimisation of these properties is needed to prepare prototypes and to establish the full potential of these materials for application in magnetic micro-systems. SEM image of the cross section of a NdFeB film deposited on a patterned Si wafer. Sujet exact, moyens disponibles The subject of this training period is the preparation, characterisation and optimisation of topographically patterned hard magnetic films. Micro-machining of both the substrate and the magnetic film will be studied. Structural characterisation will be carried out using x-ray diffraction and electron microscopy while the magnetic properties of the films will be studied using VSM / SQUID magnetometry and magneto-optic microscopy. The magnetic and mechanical properties of the micro-magnets will be optimised through a variation of patterning parameters, sputtering conditions and thermal processing of the films. Prototype systems will be developed for bio-applications. Interactions et collaborations éventuelles, y compris les ouvertures internationales potentielles ou réelles à la suite ou dans le cadre des collaborations This work will be carried out in the framework of a number of on-going internal and external collaborations. Ce stage pourra se poursuivre par une thèse. This project could be followed up with a PhD thesis dealing with the development of prototype magnetic micro-systems. Formation / Compétences : Physics, Materials Science, Magnetism Période envisagée pour le début du stage : fev/mars 2012 Contact : Nora Dempsey / Frédéric Dumas-Bouchiat Laboratoire actuel Institut Néel tél 0476887435 mel [email protected] / [email protected] plus d'information sur : http://neel.cnrs.fr