doctrivac s 40 b, d 40 bs 65 b, d 65 b
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trivac s 40 b, d 40 bs 65 b, d 65 b
TRIVAC S 40 B, D 40 B S 65 B, D 65 B Ersatzteilliste / Spare Parts / Liste des Pièces de Rechange ET 01203_000_15 Drehschieber-Vakuumpumpe Rotary Vane Vacuum Pump Pompe rotative à vide à palettes Gültig ab: 1. Oktober 2005 - ersetzt alle bisherigen Versionen Valid from: October 1, 2005 - replaces all previous versions Valable à partir du : 1er octobre 2005 – remplace toutes les versions antérieures 2 ET01203_000_15 - 03/2010 - © Oerlikon Leybold Vacuum Pos. S40B D40B S65B D65B A B C Ersatzteil Kits / Spare Parts Kits TRIVAC S/D 40/65 B Stückzahl / Quantity Nombre de pièces 1 1 1 1 1 1 1 1 1 C 1 1 C C 1 Benennung Description Désignation Ersatzteil Kit für den Simmeringwechsel Spare part kit for the exchange Kit joint radial of the radial shaft seal (comprend tout le matériel (beinhaltet alle notwendigen Dichtungen und Kleinteile) (includes all material needed) nécessaire) kleines Wartungs Kit minor Maintenance Kit Kit maintenance mineur für die einfache Wartung (beinhaltet alle notwendigen Dichtungen, kein Öl) (includes all seal, no oil) (comprend tous les joints, hors huile) großes Wartungs Kit major Maintenance Kit Kit maintenance majeure beinhaltet alle notwendigen Verschleiß und Ersatzteile für die große Wartung, kein Öl includes all wear and sealing parts needed for a major maintenance, no oil (comprend toutes les pièces d'usures et joints nécessaires pour un entretien majeur, hors huile) großes Wartungs Kit major Maintenance Kit Kit maintenance majeure beinhaltet alle notwendigen Verschleiß und Ersatzteile für die große Wartung, kein Öl includes all wear and sealing parts needed for a major maintenance, no oil (comprend toutes les pièces d'usures et joints nécessaires pour un entretien majeur, hors huile) großes Wartungs Kit major Maintenance Kit Kit maintenance majeure beinhaltet alle notwendigen Verschleiß und Ersatzteile für die große Wartung, kein Öl includes all wear and sealing parts needed for a major maintenance, no oil (comprend toutes les pièces d'usures et joints nécessaires pour un entretien majeur, hors huile) großes Wartungs Kit major Maintenance Kit Kit maintenance majeure beinhaltet alle notwendigen Verschleiß und Ersatzteile für die große Wartung, kein Öl includes all wear and sealing parts needed for a major maintenance, no oil (comprend toutes les pièces d'usures et joints nécessaires pour un entretien majeur, hors huile) D 1 1 1 1 Dichtungssatz Set of seals Jeu de joints S 1 1 1 1 Kleinteile-Kit Small Part Kit Kit petites fournitures 1 Ersatzpumpmodul Ersatzpumpmodul Ersatzpumpmodul Ersatzpumpmodul Replacement Replacement Replacement Replacement 1 1 1 pump pump pump pump module module module module Corps Corps Corps Corps de de de de pompe pompe pompe pompe Bestell-Nr. Ref. No. Réf. EK110 002 629 EK110 002 624 EK110 002 615 EK110 002 613 EK110 002 614 EK110 002 612 197 22 EK110 002 636 E200 E200 E200 E200 10 10 10 10 941 933 947 944 C,D(1620) 1650 S(1070) 610 A,B,C,D C,D(1130) 1120 (1060) C,D(790) C,D(1100) 780 1090 S(770) S(1080) S(800) 810 ET01203_000_15 - 03/2010 - © Oerlikon Leybold Vacuum C,D(670) C,D(660) 650 S(640) 630 S(620) S(1500) 1490 1020 C 1040 1050 (1030) Abb./Fig. 1 TRIVAC S/D 40/65 B 3 4 ET01203_000_15 - 03/2010 - © Oerlikon Leybold Vacuum 1310 B,C,D(1420) 1010 1330 S(1340) C,D(1430) S(540) 530 520 S(1450) 510 C,D (500) S(760) 460 B,C,D (450) 490 S (1560) C,D 1550 1510 (1410) Abb./Fig. 2 TRIVAC D 40/65 B; S 40/65 B ähnlich/similar/similaire S (1460) S 690 C,D C,D 750 1610 (1440) (700) (710) S(2 C( S(3 C, C(2 D 30 C( (300) ) C( C(2 S(2 2 S(3 80 32 0 22 0 36 0 38 0 50 ) S(2 S(2 70 ) 37 0 40 ) 40 0) 90 ) 35 0) 2000 33 0) 90 ) 10 ) 60 ) 410 S(170) S(430) A,C(1480) S(200) 420 S(190) ET01203_000_15 - 03/2010 - © Oerlikon Leybold Vacuum 140 S(440) 110 A,C,D(90) 80 S S C,D 40 S C,D (70) (60) (50) (30) (20) 10 S (260) Abb./Fig. 3 Pumpmodul D 40/65 B; S 40/65 B ähnlich Pumping module D 40/65 B; S 40/65 B similar Corps de pompe D 40/65 B; S 40/65 B similaire A,C,D(150) A,C,D(130) A,C,D(120) 5 6 ET01203_000_15 - 03/2010 - © Oerlikon Leybold Vacuum Pos. TRIVAC S/D 40/65 B Stückzahl / Quantity Nombre de pièces S40B D40B S65B D65B Benennung 10 20 30 40 50 60 70 80 90 110 120 130 140 150 170 190 200 220 230 230 230 240 250 260 270 280 280 280 280 290 300 310 320 330 350 360 370 370 380 380 390 1 1 1 1 1 1 1 1 1 1 1 1 1 1 3 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 3 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 3 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 3 1 1 1 2 2 1 1 2 1 1 2 2 2 2 1 2 2 1 2 2 1 1 1 1 1 1 4 4 4 1 1 1 1 4 4 4 1 1 1 5 5 5 1 1 1 1 7 7 7 1 1 1 1 1 1 2 1 2 Lagerstück Dichtnippel Druckfeder Steuerkolben Dichtung Scheibe Sicherungsring Gerotor O-Ring Zentrierscheibe Buchse O-Ring Preßscheibe Radial-Dichtring Zylinderschraube Spannscheibe Zylinderschraube VV-Anker VV-Schieber VV-Schieber VV-Schieber Paßfeder Paßfeder Zylinderstift Zylinderstift Pumpenring VV-Ring Pumpenring VV-Ring Druckfeder Rückschlagventil Düse Ventilfänger Ventilplatte Zylinderschraube Zwischenlager HV-Ring HV-Ring HV-Anker HV-Anker Zylinderstift Description Front bearing Plug seal Compression spring Control piston Gasket Disc Retainer ring Gerotor O-ring Centering disc Socket O-ring Pressed disc Radial shaft seal Cylinder screw Clamping disc Cylinder screw Rotor forestage Vane Vane Vane Key Key Cylindrical pin Cylindrical pin Pump cylinder Pump cylinder forestage Pump cylinder Pump cylinder forestage Compression spring Non-return valve Nozzle Valve stop Valve plate Cylinder screw Center bearing Pump cylinder HV-stage Pump cylinder HV-stage Rotor HV-stage Rotor HV-stage Cylindrical pin Désignation Flasque d’accouplement Joint soupape Ressort de pression Piston de réglage Joint Disque Circlip Gerotor Joint torique Disque d’centrage Douille de prise Joint torique Disque d’pression Joint radial Vis à tête cylindrique Disque de serrage Vis à tête cylindrique Rotor primaire Palette Palette Palette Clavette Clavette Goupille cylindrique Goupille cylindrique Cylindre Cylindre primaire Cylindre Cylindre primaire Ressort de pression Clapet de retenue Gigleur Butée de soupape Platine soupape Vis à tête cylindrique Palier intermédiaire Cylindre vide poussé Cylindre vide poussé Rotor basse pression Rotor basse pression Goupille cylindrique Bestell-Nr. Ref. No. Réf. Kits / Bemerkungen Kits / Notes Kits / Remarques E301 51 147 E221 61 040 ES321 06 152 (incl. 2 pieces) ES221 02 035 (incl. 5 pieces) ES231 04 009 (incl.10 pieces) E321 66 159 C, D S C, D S S A, C, D E401 57 314 A, C, D A, C, D E231 92 033 401 57 311 ES200 10 652 (incl. 2 pieces) ES200 10 653 (incl. 2 pieces) ES200 10 886 (incl. 2 pieces) E231 E231 E231 E231 E221 92 92 92 92 61 012 024 013 025 031 ES200 10 086 (incl. 3 pieces) E200 11 376 E200 11 245 E261 E231 E231 E321 E321 51 92 92 66 66 A, C, D S S S C C C S S S S C C, D S C C 139 018 019 164 165 S Pos. TRIVAC S/D 40/65 B Stückzahl / Quantity Nombre de pièces S40B D40B S65B D65B Benennung ET01203_000_15 - 03/2010 - © Oerlikon Leybold Vacuum 400 400 410 420 430 440 450 460 490 500 510 520 530 540 610 620 630 640 650 660 670 690 700 710 750 760 770 780 790 800 810 1010 1010 1020 1030 1040 1040 1050 1060 1070 1080 2 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 2 8 4 1 1 1 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 2 8 4 1 1 1 1 1 2 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 2 8 4 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 3 3 4 1 3 3 4 1 3 3 4 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 2 8 4 1 1 1 1 1 1 1 1 1 3 3 4 HV-Schieber HV-Schieber Lagerdeckel Überdruckventil Düse Zylinderschraube Formfilter Rahmen Stehbolzen O-Ring Preßscheibe Druckfeder Spannscheibe Zylinderschraube Kupplungsgehäuse Zylinderschraube Halteblech Druckfeder Kolben O-Ring Dichtelement Kolben Ventilteller O-Ring Stutzen Zylinderschraube Zylinderschraube Deckel Dichtung Schneidschraube Blende Ölkasten Ölkasten Exzenter O-Ring Welle Welle Knebel Dichtring Verschlußschraube Zylinderschraube Description Vane Vane Rear end plate Pressure valve Nozzle Cylinder screw Internal demister Frame Stud bolt O-ring Pressed disc Split spring Clamping disc Cylinder screw Coupling housing Cylinder screw Supporting plate Compression spring Piston O-ring Seal Piston Valve plat O-ring Connecting port Cylinder screw Cylinder screw Cover Gasket Tapping screw Shutter Oil casing Oil casing Cam O-ring Shaft Shaft Lever Gasket ring Plug screw Cylinder screw Désignation Palette Palette Flasque arrière Soupape de pression Gigleur Vis à tête cylindrique Filtre Châssis Boulon fileté Joint torique Disque d’pression Ressort de pression Disque de serrage Vis à tête cylindrique Carter d’accouplement Vis à tête cylindrique Plaque de retenue Ressort de pression Piston Joint torique Joint Piston Platine soupape Joint torique Raccord d’admission Vis à tête cylindrique Vis à tête cylindrique Couvercle Joint Vis autotaraudeuse Diaphragme Carter d’huile Carter d’huile Excentrique Joint torique Arbre Arbre Levier Joint Bouchon de fermeture Vis à tête cylindrique Bestell-Nr. Ref. No. Réf. Kits / Bemerkungen Kits / Notes Kits / Remarques ES200 10 652 (incl. 2 pieces) ES200 10 886 (incl. 2 pieces) E351 11 012 E401 75 023 ES393 50 018 (incl. 3 pieces) C C S S B, C, D 371 82 143 E201 03 010 C, D ES200 09 135 (incl. 2 pieces) 200 09 118 401 57 311 S 331 68 006 S 451 74 039 ES221 61 041 (incl.10 pieces) 321 06 151 S C, D C, D ES321 06 155 C, D C, D ES431 71 255 (incl. 2 pieces) S S E200 10 045 C, D S ES200 09 335 (incl. 5 pieces) 200 09 342 200 09 348 281 53 015 C 401 57 329 401 57 331 ES281 53 014 (incl.10 pieces) ES201 27 105 (incl. 5 pieces) A, B, C, D S S 7 8 ET01203_000_15 - 03/2010 - © Oerlikon Leybold Vacuum Pos. TRIVAC S/D 40/65 B Stückzahl / Quantity Nombre de pièces 1090 1110 1120 1140 1310 1310 1330 1340 1410 1420 1430 1440 1450 1460 1480 1490 1500 1510 1550 1550 1550 1550 1560 1610 1620 1650 2000 2000 1 1 1 1 1 1 1 4 1 1 1 6 4 2 1 1 4 4 4 1 1 1 1 1 1 1 4 1 1 1 6 4 2 1 1 4 4 1 1 1 1 1 1 1 4 1 1 1 6 4 2 1 1 4 4 1 1 1 1 1 1 1 4 1 1 1 6 4 2 1 1 4 4 4 4 4 1 2 2 1 4 1 2 2 1 4 1 2 2 4 4 1 2 2 1 1 Description Benennung S40B D40B S65B D65B Rahmen O-Ring Ölschauglas Dichtung Motor Motor Zwischenflansch Zylinderschraube Dichtung Dichtung Dichtung Zylinderschraube Zylinderschraube Kerbstift Zahnkranz Pumpenfuß Zylinderschraube Fuß Zuganker Zuganker Zuganker Zuganker Sechskantmutter Schmutzfänger O-Ring Spannring Kupplung Kupplung Frame O-ring Oil level glass Gasket Motor Motor Motor connect flange Cylinder screw Gasket Gasket Gasket Cylinder screw Cylinder screw Grooved pin Toothed ring Pump base Cylinder screw Foot Tie rod Tie rod Tie rod Tie rod Hexagon nut Dirt trab O-ring Clamping ring Coupling Coupling Désignation Châssis Joint torique Niveau d’huile Joint Moteur Moteur Contrebride moteur Vis à tête cylindrique Joint Joint Joint Vis à tête cylindrique Vis à tête cylindrique Goupille cannelée Jante dentée Socle de pompe Vis à tête cylindrique Pied Tirant Tirant Tirant Tirant Ecrou hexagonal Piège à impuretes Joint torique Collier de fermeture Accouplement Accouplement Bestell-Nr. Ref. No. Réf. Kits / Bemerkungen Kits / Notes Kits / Remarques E200 10 043 C, D E350 01 179 E380 66 012 200 10 412 C, D 3~ , 218-242 / 380-420 V, 240-277 / 414-480 V, 3~ , 190-210 / 330-400 V, 190-230 / 330-400 V, E200 09 126 S C, D B, C, D C, D S S S A, C 200 10 044 S ES348 61 037 (incl. 4 pieces) 101 20 010 101 20 011 101 20 012 101 20 013 S 411 70 121 C, D 183 43 570 42 005 570 42 006 50 Hz 60 Hz 50 Hz 60 Hz Notizen ET01203_000_15 - 03/2010 - © Oerlikon Leybold Vacuum Eine Änderung der Konstruktion und der angegebenen Daten behalten wir uns vor. Die Abbildungen sind unverbindlich. We reserve the right to modify the design and the specified data. The illustrations are not binding. Sous réserve de modifications de la construction et des données techniques. Les figures ne nous engagent pas. 9 Germany Europe Sales and Service Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne Phone: +49-(0)221-347 1234 Fax: +49-(0)221-347 1245 [email protected] www.oerlikon.com Great Britain Oerlikon Leybold Vacuum UK LTD. Silverglade Business Park Leatherhead Road Unit 2 KT9 2QL Chessington, Surrey (London) Sales: Phone: +44-13-7273 7300 Fax: +44-13-7273 7301 [email protected] Service: Phone: +44-20-8971 7030 Fax: +44-20-8971 7003 [email protected] Oerlikon Leybold Vacuum France S.A. Valence Factory 640, Rue A. Bergès B.P. 107 640 F-26501 Bourg-lès-Valence Cedex Service: Phone: +33-4-75 82 33 00 Fax: +33-4-75 82 92 69 [email protected] France Oerlikon Leybold Vacuum France S.A. 7, Avenue du Québec Z.A. de Courtaboeuf 1 - B.P. 42 F-91942 Courtaboeuf Cedex Sales and Service: Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 [email protected] [email protected] Belgium Oerlikon Leybold Vacuum Nederland B.V. Belgisch bijkantoor Leuvensesteenweg 542-9A B-1930 Zaventem Sales: Phone: +32-2-711 00 83 Fax: +32-2-720 83 38 [email protected] Service: Phone: +32-2-711 00 82 Fax: +32-2-720 83 38 [email protected] Oerlikon Leybold Vacuum GmbH Sales Area North/Northeast Branch Office Berlin Industriestrasse 10b D-12099 Berlin Phone: +49-(0)30-435 609 0 Fax: +49-(0)30-435 609 10 [email protected] Oerlikon Leybold Vacuum GmbH Sales Area South/Southwest Branch Office Munich Karl-Hammerschmidt-Strasse 34 D-85609 Aschheim-Dornach Phone: +49-(0)89-357 33 9-10 Fax: +49-(0)89-357 33 9-33 [email protected] [email protected] Oerlikon Leybold Vacuum GmbH Sales Area West & Benelux Branch Office Cologne Bonner Strasse 498 D-50968 Cologne Phone: +49-(0)221-347 1270 Fax: +49-(0)221-347 1291 [email protected] Oerlikon Leybold Vacuum GmbH Service Competence Center Emil-Hoffmann-Strasse 43 D-50996 Cologne-Suerth Phone: +49-(0)221-347 1538 Fax: +49-(0)221-347 1945 [email protected] Oerlikon Leybold Vacuum GmbH Mobil Customer Service Emil-Hoffmann-Strasse 43 D-50996 Cologne-Suerth Phone: +49-(0)221-347 2001 Fax: +49-(0)221-347 1944 [email protected] Italy Oerlikon Leybold Vacuum Italia S.r.l. Via Trasimeno 8 I-20128 Milano Sales: Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 [email protected] Service: Phone: +39-02-27 22 31 Fax: +39-02-27 22 32 17 [email protected] Oerlikon Leybold Vacuum USA Inc. 5700 Mellon Road USA-Export, PA 15632 Phone: +1-724-327-5700 Fax: +1-724-325-3577 [email protected] Oerlikon Leybold Vacuum Dresden GmbH Service Competence Center Zur Wetterwarte 50, Haus 304 D-01109 Dresden Service: Phone: +49-(0)351-88 55 00 Fax: +49-(0)351-88 55 041 [email protected] 03.10 LV_10659_2010 Netherlands Oerlikon Leybold Vacuum Nederland B.V. Proostwetering 24N NL-3543 AE Utrecht Sales and Service: Phone: +31-(30) 242 6330 Fax: +31-(30) 242 6331 [email protected] [email protected] Spain Oerlikon Leybold Vacuum Spain, S.A. C/ Huelva 7 E-08940 Cornellà de Llobregat (Barcelona) Sales: Phone: +34-93-666 43 11 Fax: +34-93-666 43 70 [email protected] Service: Phone: +34-93-666 46 16 Fax: +34-93-685 43 70 [email protected] Switzerland Oerlikon Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 CH-8050 Zürich Sales: Phone: +41-44-308 40 50 Fax: +41-44-302 43 73 [email protected] Service: Phone: +41-44-308 40 62 Fax: +41-44-308 40 60 [email protected] America Oerlikon Leybold Vacuum USA Inc. 5700 Mellon Road USA-Export, PA 15632 Phone: +1-724-327-5700 Fax: +1-724-325-3577 [email protected] Sales: Eastern & Central time zones Phone: +1-724-327-5700 Fax: +1-724-333-1217 Pacific, Mountain, Alaskan & Hawaiian time zones Phone: +1-408-436-2828 Fax: +1-408-436-2849 Service: Phone: +1-724-327-5700 Fax: +1-724-325-3577 Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne Phone: +49-(0)221-347 0 Fax: +49-(0)221-347 1250 [email protected] Asia P.R. China Oerlikon Leybold Vacuum (Tianjin) International Trade Co. Ltd. Beichen Economic Development Area (BEDA), No.8 Western Shuangchen Road Tianjin 300400 China Sales and Service: Phone: +86-22-2697 0808 Fax: +86-22-2697 4061 Fax: +86-22-2697 2017 [email protected] [email protected] [email protected] Oerlikon Leybold Vacuum (Tianjin) Co. Ltd. Beichen Economic Development Area (BEDA), No.8 Western Shuangchen Road Tianjin 300400 China Sales and Service: Phone: +86-22-2697 0808 Fax: +86-22-2697 4061 [email protected] [email protected] [email protected] Oerlikon Leybold Vacuum (Tianjin) International Trade Co. Ltd. Shanghai Branch: No.33 76 Fu Te Dong San Road Waigaoqiao Free Trade Zone Shanghai 200131 China Sales and Service: Phone: +86-21-5064-4666 Fax: +86-21-5064-4668 [email protected] [email protected] [email protected] Oerlikon Leybold Vacuum (Tianjin) International Trade Co. Ltd. Guangzhou Office and Service Center 1st F, Main Building Science City Plaza, No.111 Science Revenue, Guangzhou Science City (GZSC) 510663, Guangzhou, China Sales: Phone: +86-20-223 23 980 Fax:+86-20-223 23 990 [email protected] [email protected] [email protected] Oerlikon Leybold Vacuum (Tianjin) International Trade Co. Ltd. Beijing Branch: 1-908, Beijing Landmark Towers 8 North Dongsanhuan Road Beijing 100004 China Sales: Phone: +86-10-6590-7622 Fax: +86-10-6590-7607 [email protected] [email protected] India Oerlikon Leybold Vacuum India Pvt Ltd. EL 22, J-Block MIDC Bhosari Pune 411026 India Sales and Service: Phone: +91-20-3061 6000 Fax: +91-20-2712 1571 [email protected] [email protected] Japan Oerlikon Leybold Vacuum Japan Co., Ltd. Headquarter 23-3, Shin-Yokohama 3-chome Tobu A.K. Bldg. 4th Floor Kohoku-ku Yokohama-shi 222-0033 Sales: Phone: +81-45-471-3330 Fax: +81-45-471-3323 [email protected] [email protected] Oerlikon Leybold Vacuum Japan Co., Ltd. Osaka Sales Office 3F, Shin-Osaka Terasaki No.3 Bldg. 1-5-28 Nishi-Miyahara Yodogawa-ku, Osaka-shi Osaka 532-0004 Phone: +81-6-6399-6271 Fax: +81-6-6399-6273 [email protected] [email protected] Oerlikon Leybold Vacuum Japan Co., Ltd. Tsukuba Technical Service Center Kogyo Danchi 21, Kasuminosato, Ami-machi, Inashiki-gun Ibaraki-ken, 300-0315 Service: Phone: +81-298 89 2841 Fax: +81-298 89 2838 [email protected] [email protected] South Korea Oerlikon Leybold Vacuum Korea Ltd. 3F. Jellzone 2 Tower Jeongja-dong 159-4 Bundang-gu Sungnam-si Gyeonggi-do Bundang 463-384, Korea Sales: Phone: +82-31 785 1367 Fax: +82-31 785 1359 [email protected] Service: 623-7, Upsung-Dong Cheonan-Si Chungcheongnam-Do Korea 330-290 Phone: +82-41 589 3035 Fax: +82-41 588 0166 [email protected] Singapore Oerlikon Leybold Vacuum Singapore Pte Ltd. 1 Science Park Road Singapore Science Park 2 #02-12, Capricorn Building Singapore 117528 Sales and Service: Phone: +65-6303 7000 Fax: +65-6773 0039 [email protected] [email protected] Taiwan Oerlikon Leybold Vacuum Taiwan Ltd. No 416-1, Sec. 3 Chunghsin Road., Chutung Hsinchu County 310 Taiwan, R.O.C. Sales and Service: Phone: +886-3-500 1688 Fax: +886-3-583 3999 [email protected] [email protected] www.oerlikon.com/ leyboldvacuum
