ESC controller. Customized to improve electrostatic clamp operation.

ESC controller.
Customized to improve electrostatic clamp operation.
ESC controller.
Berliner Glas offers fully customizable controller to improve electrostatic clamp operation in various semiconductor applications
and enables full access and control to all necessary process parameters.
Five reasons to choose controllers made by Berliner Glas:
1. Single supplier for clamp and customized controller ensures
systems performance
2. Improved ESC operation with minimal de-clamping time
3. U
niform and constant clamping force during wafer
processing
4. Wafer charging control to minimize wafer sticking and
particle generation
5. Standard interfaces to machine and heater control
Applications
ESC for semiconductor equipment industry
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Combined ESC and heater for coating, etching and bonding
processes
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Improved clamping of dielectric materials for advanced
packaging
Basic features
Fully customizable controller housing
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Monitoring and full control of clamp voltage and current via
analogue – digital I/O port
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Short circuit and over voltage / current protection (interlock)
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Plug & Play including peripheral wiring
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CE, RoHS and EM certified
Additional features
■Custom interface [e.g. Canbus (DeviceNet), Ethernet, PLC,
RS232, RS485]
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Advanced measurement of current and capacitance with a
resolution of ≤5 nA/≤10 pF
■
Extended status information (voltage/current/capacitance/
wafer status)
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Increase of ESC performance by use of adapted algorithms for
optimal electrostatic force profile
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Software solutions for improved de-clamping process (automated procedures including polarity switching)
■Additional multi zone heater control
■Clean room ready
Controller performance - typical values
■Bipolar voltage supply
■Output voltage: up to ±5 kV per channel
■Output current: up to 4 mA per channel
■Input voltage: 24 VDC (other available), 85–240 VAC, 50–60 Hz
■Current resolution: down to 5 nA
■Capacitance resolution: down to 10 pF
■Ramp rate: up to 6 kV/s
www.berlinerglas.com
Berliner Glas KGaA Herbert Kubatz GmbH & Co.
Waldkraiburger Strasse 5, D-12347 Berlin, Phone + 49 30 60905-0, Fax + 49 30 60905-100, [email protected]
© Berliner Glas Group/Mai 2015
Customized controller housing