Abstracts - Plasma Québec
Transcription
Abstracts - Plasma Québec
Plasma Quebec’16; 1 et 2 juin 2016 à l’Université de Montréal. Radio-frequency Magnetron sputtering of ferroelectric Hf0.5Zr0.5O2 films; Processing and characterization F. Ambriz-Vargas1, R. Nouar2, A. Sarkissian2, R.Thomas1 and A. Ruediger1 1 Nanoelectronics-Nanophotonics, INRS-Énergie Matériaux et Télécommunications, 2 Plasmionique Inc. 1650 Lionel-Boulet, Varennes, Québec, J3X1S2, Canada Recently, ferroelectric thin films for non-volatile semiconductor memory application was restricted to perovskite and Aurivillius class of materials. However, these multifunctional oxides suffer from lack of CMOS compatibility due to poor interfacing with silicon and electrical degradation under forming gas treatment. These issues along with the inability to down scale further preventing its use in high density memories [1]. Recent studies showed that the ferroelectricity of Hf0.5Zr0.5O2 films may provide the solution to this problem, according to the following reasons: 1. High compatibility with CMOS technology, nowadays the semiconductor industry uses the binary oxide of HfO2 and ZrO2 as a high-k dielectric material for the replacement of SiO2 in advanced semiconductor devices [2]. 2. High scalability, the large band gap (Eg >5eV) of Hf0.5Zr0.5O2 films ensure more than 1eV band offset with respect to metal or semiconductor, allowing for a thickness reduction below 10 nm with low leakage current [3]. 3. Good ferroelectric properties in ultrathin form (thickness below 3nm), contrary to conventional perovskite materials, where ferroelectricity disappears below a certain thickness (~ 2 nm), in these material ferroelectricity disappears above a critical thickness (~10 nm) [3]. Owing to the importance of Hf0.5Zr0.5O2 films to the semiconductor industry, the present work reports the radio-frequency magnetron sputtering deposition of Hf0.5Zr0.5O2 on Pt/Al2O3/SiO2/Si substrates, where sstructural, compositional and morphological evolutions were studied as a function of various processing parameters and thicknesses to understand the formation of Hf0.5Zr0.5O2 and its ferroelectric properties. Such a study will be instructive in understanding the thickness dependent ferroelectric properties of Hf0.5Zr0.5O2. References 1. 2. 3. Martin, D., et al., Downscaling ferroelectric field effect transistors by using ferroelectric Si-doped HfO2. Solid-State Electronics, 2013. 88: p. 65-68. Müller, J., et al., Ferroelectric Zr0.5Hf0.5O2 thin films for nonvolatile memory applications. Applied Physics Letters, 2011. 99(11): p. 112901. Cho, D.-Y., H.-S. Jung, and C.S. Hwang, Structural properties and electronic structure ofHfO2-ZrO2composite films. Physical Review B, 2010. 82(9). Characterization of fibrillary structures appearing on polymeric surfaces after femtosecond laser micromachining . Y. Assaf, A-M Kietzig; Department of Chemical Engineering, McGill University Laser micromachining is a fast and contactless method to alter the topology, and thus the properties, of a material’s surface. With the emergence of femtosecond (fs) laser technology, this technique now allows the modification of target surfaces at the nanoscale. It has recently been shown that, under certain circumstances, superhydrophobic fibrillary structures appear on fs textured poly(tetrafluoro ethylene) (PTFE). Other than exhibiting altered wetting properties, these structures also offer a much larger surface area and porosity when compared to the base material. If these structures could be functionalized, reproduced on different polymers, or have their properties controlled, they could be used in a very wide range of applications such as selfcleaning materials and biomedical devices. Unfortunately, current fs laser-polymer interaction theory does not explain how and why these structures form or what their properties are. Most of the uncertainty stems from the fact that polymers exhibit non-linear optical effects and tend to undergo photochemical reactions during machining. In this work, a parametric study of surface structure formation with respect to fs laser machining parameters was conducted for a selection of different polymers. First, the standard laser ablation models were fit against machining data for each material. Thus, several parameters of interest such as ablation threshold fluence and incubation coefficients were obtained. Afterwards, the polymers had their surface modified by laser area ablation and several types of microstructures were observed and imaged. With the help of fractal and lacunarity analysis of the images, the different structures were quantitatively compared and classified. Through that process, fibrillary structures were confirmed to form on several polymers other than PTFE under different conditions. As a next step, the evolution of the surface optical properties of the different polymers as a function of machining parameters was tracked using UV-VIS spectrophotometry. These experiments showed that the formation of such structures was accompanied with a large increase in absorption as well as a transition from non-linear to linear light absorption for some materials. Crystallographic measurements were further carried out in order to determine if this is due to a local increase in crystallinity at the surface of the samples. Finally, the evolution in chemical composition and bonding structure of the different polymers as a function of machining parameters was also tracked using XPS. These experiments showed that the fibrillary microstructure is susceptible to oxidation at high fluence and that polymers with high oxygen content are less likely to form such a structure. In conclusion, this work involved a wide parametric study of the ablation behavior of several polymers during fs laser machining. The conditions under which different microstructures are formed were identified for a selection of different thermoplastics. These structures were then characterized both optically and chemically. Through these experiments, the intrinsic physico-chemical properties of a polymer that dictate its final surface structure were identified. Therefore, our work significantly contributes to the material selection process when intending to machine a polymer with fs lasers for a specific application. The Effect of Surface Chemistry on Monocyte Adhesion to Plasma Deposited Functional Organic Coatings Sara Babaei1, Natalie Fekete2, Corinne A. Hoesli2, Pierre-Luc Girard-Lauriault1 1 Plasma Processing Laboratory, Department of Chemical Engineering, McGill University, Montreal, QC, H3A 0C5, Canada 2 Stem Cell Bioprocessing Laboratory, Department of Chemical Engineering, McGill University, Montreal, QC, H3A 0C5, Canada Monocytes play a crucial role in inflammatory responses to implanted biomaterials. It has been reported that the behavior of cells on a biomaterial is influenced by both their intrinsic phenotype and their extracellular environment. Therefore, monocyte adhesion to a biomaterial may present different characteristics and may be significantly influenced by the chemical nature and physical microstructure of the biomaterial. In this contribution, different plasma deposited functional organic coatings were prepared by low-pressure plasma copolymerization of binary gas mixtures constituted of a hydrocarbon (ethylene or butadiene) and a heteroatom containing gas (ammonia or carbon dioxide) in order to deposit either nitrogen or oxygen containing coatings. The coated surfaces were characterized using various techniques including x-ray photon spectroscopy and ultraviolet-visible spectroscopy. The surface charge and stability of the coatings were measured by use of electro kinetic analyser and profilometer, respectively. The U937 myeloid cell line and NB4 promyelocytic cell line were cultured for a period of 1h on plasma polymerized coatings with varying surface chemistry and surface charge using cell culture medium with and without fetal bovine serum before cell adhesion was assessed by optical microscopy. The results showed that the nitrogen and oxygen content of the plasma polymers control the adhesion of U937 and NB4 cell lines to the coatings, where above a threshold, the surface shows affinity towards these cell lines irrespective of the culture medium used. Colloque Plasma-Québec, Université de Montréal, 1-2 Juin 2016 Pulseur nanoseconde haute tension-haute fréquence à compression magnétique pour la génération de plasma à pression atmosphérique V. Baillard,a M.D.G. Evans,a,b, J.M. Bergthorson,b S. Coulombe,a aPlasma Processing Laboratory, Département de génie chimique, Université McGill bAlternative Fuels Laboratory, Département de génie mécanique, Université McGill Les activités de recherche sur les décharges électroluminescentes entretenues par l’application d’impulsions courtes à forte tension se sont intensifiées, et en particulier pour les applications en combustion assistée par plasma1 (CAP) et en allumage de flamme2. La CAP s’effectue dans des mélanges de carburants et d’oxydants à des pressions de quelques dizaines d’atmosphères. Ces conditions d’opération imposent des seuils de tension élevés et la nécessité de produire des décharges non-thermiques de grands volumes impose des contraintes sur la durée des impulsions. Les générateurs d’impulsions courtes (10-1000 ns) à forte amplitude de tension permettent d’obtenir cette réactivité chimique à basse température. Ces générateurs permettent également de contrôler la quantité d’énergie injectée dans la décharge et de minimiser la conversion en énergie thermique. Cette affiche présente les travaux menés sur l’élaboration et la construction d’une nouvelle source d’impulsions courtes à haute tension et haute fréquence, utilisant la technologie de compression magnétique pour l’application à la génération de plasma non-thermique à haute pression. Le principe physique à l’œuvre dans le générateur d’impulsions est la très forte variation de l’inductance à un temps spécifique d’application de tension qu’offre un inducteur à cœur ferromagnétique3 (∆L/L > 1000). Ces inducteurs sont ici utilisés comme interrupteurs non-conventionnels pour transférer l’énergie de chaque impulsion à travers les différentes sections de l’appareil. Le circuit est construit en trois parties. La section à Basse Tension utilise des transistors IGBT pour décharger un condensateur de 1 mF à une fréquence fixe, qui délivre une impulsion de courant de quelques μs et de plus de 150 A. La section de Compression Magnétique transforme cette impulsion en augmentant sa tension et en réduisant sa durée par l’utilisation de transformateurs saturables. Enfin, la section de Haute Tension double la tension de l’impulsion finale, tout en effectuant une dernière étape de compression magnétique, et l’applique à la charge en fin de ligne. Des expériences furent menées avec une charge de 3000 Ω, en y appliquant des impulsions de plus de 20 kV, à une fréquence de plusieurs dizaines de kHz. La durée totale à mi-hauteur de l’impulsion est de moins de 150 ns, pour toute la gamme de tension disponible. Références 1. S. Nagaraja, T. Li, J. A. Sutton, I. V Adamovich, V. Yang, Proc. Combust. Inst. 35 (2015) 1–22. 2. D. R. Singleton, A. Kuthi, J. M. Sanders, M. A. Gundersen, A. Simone, S. J. Pendleton, IEEE Trans. Dielectr. Electr. Insul. 18 (2011) 1084–1090. 3. W. C. Nunnally, Los Alamos, Magnetic Switches and Circuits (1982) Caractérisation de la génération de bulles lors de l’ablation laser des nanoparticules d’or en solution A. Berchtikou, Esen Sokullu, Marc Andre Gauthier and T. Ozaki Institut national de la recherche scientifique – Centre Energie, Matériaux et Telécommunications, 1650 Lionel-Boulet, Varennes, Québec J3X 1S2, Canada Author e-mail address:[email protected] Résume Le principe du traitement par choc laser consiste à induire un effet purement mécanique dans un matériau à partir de la détente d’un plasma généré à sa surface par un rayonnement laser impulsionnel (quelques ns et quelques GW/cm2). L’énergie laser est absorbée dans une très faible épaisseur du matériau (nanoparticules d’or) à traiter qui est rapidement vaporisée et ionisée. La détente de cette vapeur partiellement ionisée provoque alors, par effet de recul, une pression qui est appliquée à la surface nanoparticules d’or. L’expansion du plasma dans les liquides est accompagnée par la production de bulles qui sont formées lors de la vaporisation du liquide en contact avec le plasma chaud. Ces bulles coalescent très rapidement pour produire une grosse bulle unique appelée bulle de cavitation. Il a été découvert que le rayon de la bulle de cavitation ainsi que son temps de vie étaient dépendants de l’énergie laser, de l’épaisseur de la cible et sa concentration. Laser-induced Breakdown Spectroscopy for Efficient High-order Harmonic Generation M. A. Fareed, A. Berchtikou, N. Thiré, S. Mondal, B. E. Schmidt, F. Légaré, and T. Ozaki Institut national de la recherche scientifique – Centre Energie, Matériaux et Telécommunications, 1650 Lionel-Boulet, Varennes, Québec J3X 1S2, Canada Author e-mail address: [email protected] High-order harmonic generation from laser-ablated plumes has been demonstrated to be an efficient technique to generate ultrashort pulses of extreme ultraviolet radiations with high photon flux [1,2]. In this technique, a heating pulse (called prepulse) is used to ablate plasma plume from the surface of a solid material. Then this plasma is cooled down for few tens of nanoseconds to produce the neutrals in the plasma plume. Finally, an ultrashort laser pulse (called main pulse) irradiates this plume to generate high-order harmonics [3]. For the laser-ablation, information of the laser-ablated species is essential to study the characteristics of high-order harmonics generated with the main pulse. Then, density of the laserablated species is controlled by changing laser-ablation parameters to produce high-order harmonic with high photon flux. We use laser-induced breakdown spectroscopy to study the characteristics of laser-ablated plumes and then find optimum laser-ablation parameters to generate efficient high-order harmonics. In this work, we present our results of high-order harmonics from laser-ablated graphite plume. Information of the laser-ablated species is collected with the time-resolved laser-induced breakdown spectroscopy and high-order harmonic flux is optimized for different main pulse wavelengths ranging from 0.8 µm to 1.71 µm. We have observed that by choosing appropriate laser-ablation parameters, we can generate highly efficient sub-100 eV high-order harmonics from diatomic carbon molecules that are ablated with the prepulse from solid graphite target [4,5]. References [1] [2] [3] [4] [5] R. A. Ganeev, L. B. Elouga Bom, J. Abdul-Hadi, M. Wong, J. Brichta, V. Bhardwaj, and T. Ozaki, Phys. Rev. Lett. 102, 013903 (2009). T. Ozaki, R. A. Ganeev, M. Suzuki, and H. Kuroda, in (In Tech, 2010). R. A. Ganeev, M. Suzuki, M. Baba, H. Kuroda, and T. Ozaki, Opt. Lett. 30, 768 (2005). M. A. Fareed, S. Mondal, Y. Pertot, and T. Ozaki, J. Phys. B At. Mol. Opt. Phys. 49, 035604 (2016). M. A. Fareed, N. Thiré, S. Mondal, B. E. Schmidt, F. Légaré, and T. Ozaki, Appl. Phys. Lett. 108, 124104 (2016). Effects of irradiation parameters on femtosecond laser micromachining of metals S Biswas, A-M Kietzig Department of Chemical Engineering, McGill University, 3610 University Street, Montreal, Quebec, Canada H3A OC5 Abstract: Over the years, femtosecond (fs) laser micromachining has evolved as a novel and versatile technique for modifying optical, chemical and other material properties by creating various types of microstructures on a material. The microstructures are formed as a result of the laser-material interaction and ablation mechanisms that are governed by the material properties, the laser beam parameters and the micromachining parameters. Several reports already exist elaborating on the effects of scanning velocity, number of pulses, number of overscans, laser fluence and pulse width. However, reports on the effects of repetition rate are hard to find and the existing ones are mostly based on single spot experiments and compare the ablation depth and ablation rate between wide repetition ranges. Our work thus contributes to the current state of knowledge with investigating microstructure formation in line and area scans at 1 and 10 kHz repetition rate. A Ti: sapphire laser system having a maximum output power of 4 W and operating at a wavelength of 800 nm, repetition rate of 1 kHz and pulse duration of <100 fs was used to micromachine square patches on Titanium (Ti) and Copper (Cu) samples in air. In total, three processing parameters (the power, the scanning velocity and the line overlap) were varied, and various types of microstructures (e.g. ripples, bumps, holes and chaotic microstructures) were obtained. The accumulated fluence over a single line scan (F∑pulse,max) and the total fluence over the irradiated area patch (F∑line,max) were calculated. The structure types were categorized based on scanning electron microscopy images. The different types of microstructures were plotted as a function of F∑line,max versus F∑pulse,max. These plots were compared to results previously obtained from micromachining the same materials at 10 kHz repetition rate (Ahmmed, Ling et al. 2015) On Cu, the microstructures were obtained at slightly higher accumulated fluence values when micromachined at 1 kHz than at 10 kHz repetition rate, in contrast to the microstructures obtained on Ti, which were obtained at lower accumulated fluence. Our results indicate that the effect of repetition rate on the micromachining outcome depends on the underlying material characteristics, such as the thermal conductivity and the resolidification time. Ti has a low thermal conductivity and a long resolidification time due to which the laser-induced melt layer persists for longer than in the case of Cu. When micromachined at 10 kHz, where the consecutive pulses arrive 10 times faster than at 1 kHz, the melt layer acts as a liquid dielectric for the subsequent pulses thereby increasing the threshold value. Whereas, when micromachined at 1 kHz, the subsequent pulses arrive after the resolidification has already taken place. In Cu, however, due to its high thermal conductivity and long resolidification time, the metal-dielectric like phase transition is not observed and thereby increasing the repetition rate decreases the ablation threshold. In conclusion, the effect of repetition rate on micromachining has been shown by comparing the microstructures produced at two different repetition rates. The significant differences in the micromachining outcome at the two repetition rates have been explained on the basis of a combined effect of the repetition rate and the material properties. References Ahmmed, K. M. T., et al. (2015). "Introducing a new optimization tool for femtosecond laser-induced surface texturing on titanium, stainless steel, aluminum and copper." Optics and Lasers in Engineering 66: 258-268. Eichstädt, J., et al. (2013). "Determination of irradiation parameters for laser-induced periodic surface structures." Applied Surface Science 264: 79-87. Transition de basses à hautes fréquences d’une décharge à barrière diélectrique en hélium à pression atmosphérique Jean-Sébastien Boisvert1,2, Joëlle Margot1 et Françoise Massines2 1Département de Physique, Université de Montréal, 2900 Blvd Édouard-Montpetit, H3T 1J4, Montréal (Qc), Canada 2PROMES-CNRS, Rambla de la Thermodynamique, 66100, Perpignan, France Courriel: [email protected] Les décharges à barrière diélectrique sont reconnues pour pouvoir générer des décharges homogènes à la pression atmosphérique. Dans une configuration plan-plan (avec 2 mm d’épaisseur de gaz) et avec une barrière diélectrique sur chaque électrode, une décharge homogène peut être générée lorsque la tension appliquée sur le gaz est suffisante. Par exemple, c’est le cas lorsque l'onde d'excitation sinusoïdale est d'une fréquence de 25 kHz et que l'espace gazeux est rempli d'hélium dans un mélange de Penning avec de l'azote. Ces conditions permettent de produire une décharge luminescente (APGD), typique pour une excitation de basses fréquences. Dans les mêmes conditions, lorsque la fréquence est de 13,56 MHz, dans la plage des hautes fréquences, la nature de la décharge est complètement différente. On parle plutôt d'un plasma continu fluctuant entre deux gaines oscillantes. Ce comportement est identifié à une décharge capacitive (CCRF) dans le régime α. Dans cette contribution, nous étudions la transition au cours de laquelle la décharge passe d'une APGD en basse fréquence à une décharge en régime RF-α. L'imagerie rapide est utilisée comme diagnostic principal pour visualiser cette transition. À partir de 100 kHz, la décharge n'est plus purement en régime luminescent. Cette transition survient lorsque le temps de pause entre deux demi-périodes d'oscillation est trop court pour que les pertes par recombinaisons soient significatives dans la colonne positive. Ce comportement donne lieu à un mode hybride qui est maintenu jusqu'à environ 5 MHz, fréquence à partir de laquelle la décharge montre clairement un régime RF-α. De plus, lorsque la fréquence se situe dans la plage des moyennes fréquences (0,3 à 3 MHz) le mode Ω peut être maintenu pour de faible tension appliquée. La spectroscopie d'émission optique est utilisée pour comparer les différents régimes de décharge obtenus. Alors que les régimes luminescent et RF-α sont très semblables, le spectre de la décharge en régime Ω est très différent. Plus précisément, le rapport des émissions d'hélium sur celles des impuretés (majoritairement OH, N2 et N2+) est beaucoup plus faible dans ce régime qu'en régime luminescent et RF-α. Ce qui indique que le rôle des électrons énergétiques par rapport au rôle des atomes dans un état métastable est significativement plus faible en régime Ω. Autrement dit, la température électronique devrait y être plus faible. Spatio-Temporal Confinement of Airy Bullets Domenico Bongiovanni1, Benjamin Wetzel1, Yi Hu2, Zhigang Chen2,3 and Roberto Morandotti1 1 INRS-EMT, 1650 Blvd. Lionel-Boulet, Varennes, Québec J3X 1S2, Canada The MOE Key Laboratory of Weak-Light Nonlinear Photonics, TEDA Applied Physics Institute and School of Physics, Nankai University, Tianjin 300457, China 3 Department of Physics & Astronomy, San Francisco State University, San Francisco, CA 94132, USA 2 Interest in Airy beams has steadily increased over the last few years due, to their peculiar characteristics, such as accelerating propagation trajectories featuring non-dispersion along with self-healing properties. These beams are relevant for both fundamental optics research and for practical applications in several fields including, for instance, the generation of curved plasma channels and optical trapping. The trajectory followed by a propagating Airy beam is parabolic and the beam does not undergo diffraction along one or two spatial dimensions. Similarly, an optical pulse featured by an Airy temporal profile is not affected by dispersion during its propagation (i.e. its temporal shape remains unchanged). Combining such confinements, both in time and space, it is possible to generate a 3D-confined accelerating optical beam, which does not diffract/disperse along any coordinate; such a wave packet is called Airy Bullet (AB). We present a numerical study of AB dynamics, providing a technique capable of optimizing the power features associated to the spatio-temporal confinement of the bullet. In particular, we show that by reshaping the initial spatio-temporal spectrum of the AB we can obtain a maximal overlap with the spectral content of the main lobe, resulting in overall enhancement of the spatio-temporal energy confinement and peak intensity of the bullet. Modèle collisionnel radiatif dépendant du temps pour l’hélium C.Boukandou Mombo,∗ J.Claustre, R. Jbilat, F. Vidal, and J-P. Matte Institut National de la Recherche Scientifique-Centre Énergie, Matériaux et Télécommunications, 1650 boul. Lionel Boulet, Varennes, Québec, Canada J3X 1S2 Un modèle collisionnel radiatif (MCR) est un outil servant à la description des plasmas. Il permet entre autre d’avoir une meilleure compréhension de leur physique et l’optimisation de leurs paramètres expérimentaux. La solution du MCR permet de connaître la fonction de distribution électronique en énergie, les densités des différents états atomiques excités ainsi que les densités des ions atomiques et moléculaires présents dans le plasma. À cet effet, dans le but de mieux comprendre la physique de l’hélium en présence de sources variant rapidement dans le temps, nous avons développé un MCR en 0-D (sans dépendance spatiale) dépendant du temps. Celui-ci résout l’équation de Boltzmann temporelle pour décrire la cinétique des électrons créés lors de la décharge, un ensemble d’équations de taux pour déterminer les populations des 42 premiers niveaux excités de l’atome d’hélium, des ions atomiques He+ , des ions ∗ moléculaires He+ 2 et des excimers He2 . Il considère également tous les processus collisionnels im- pliquant les électrons (ionisation, recombinaison, excitation, collisions superélastiques et élastiques, diffusion ambipolaire, etc.) et les processus radiatifs. Les résultats obtenus avec ce modèle sont illustrés à travers deux exemples. Le premier est une comparaison des densités de métastables obtenues numériquement avec celles mesurées expérimentalement. Le deuxième exemple concerne un problème de post-décharge. Dans ce dernier cas, nous montrons que la densité de métastables peut fortement augmenter dans ce régime. [1] L.L Alves, G. Gousset, and C.M. Ferreira, A collisional-radiative model for microwave discharges in Helium at low and intermediate pressures 25, 1713 (1992). [2] M. Santos, C. Noël, T. Belmonte, and L. L. Alves, Microwave capillary plasmas in helium at atmospheric pressure, 47, 265201 (2014). ∗ [email protected] Spatial Mapping of Nanoplasmonic-Induced Photothermal Effects in the THz Regime Holger Breitenborn,1,* Anna Mazhorova,1 Rafik Naccache,2 Matteo Clerici,3 Larousse Khosravi Khorashad,4 Alexander O. Govorov,4 Luca Razzari,1 Fiorenzo Vetrone,1,5 Roberto Morandotti1,* INRS-EMT, 1650 Boulevard Lionel-Boulet, Varennes, Québec J3X 1S2, Canada; 2Department of Chemistry and Biochemistry, Concordia University, Montréal, Québec H4B 1R6, Canada; 3School of Engineering, University of Glasgow, Glasgow, G12 8LT, United Kingdom; 4 Department of Physics and Astronomy, Clippinger Research Labs, Ohio University, Athens, Ohio 45701, United States of America; 5Centre for Self-Assembled Chemical Structures, McGill University, Montreal, Québec H3A 2K6, Canada; * [email protected], [email protected] 1 We have developed a novel temperature mapping technique exploiting the high sensitivity of terahertz (THz) waves to aqueous media. This method allowed us to investigate nanoplasmonic-induced photothermal effects such as collective heating phenomena in porcine skin. Nanoparticles possess unique optical and photothermal properties because they are capable of confining resonant photons in response to specific wavelength excitation, a process known as surface plasmon resonance (SPR) effect. One of the most interesting features of the SPR effect is that the strongly absorbed light is followed by a rapid dephasing of the coherent electron motion in tandem with a rapid energy transfer to the lattice resulting in an elevation of temperature otherwise known as collective plasmonic heating or photothermal effect. This effect is promising for a myriad of applications including therapeutic uses such as hyperthermia [1]. In this work, we report the first instance of a THz-based technique for performing a spatially resolved temperature mapping investigation of the plasmonic heating effect of an aqueous gold nanorod (GNRs) dispersion in a biological model system (porcine skin). Spatially resolved thermal mapping of the GNR injection site was achieved using a THz raster scanning technique, where the beam was scanned across the skin sample with a resolution close to diffraction limit (300 µm). The measurements of the change in temperature were done following an injection of a GNR dispersion in a porcine skin sample under plasmonic photoexcitation at 17 and 38 W/cm2 respectively (Fig.1). Figure 1 (a) Digital photograph of a porcine skin sample in which GNRs were injected. The red ellipse marks the injection site in the skin. Thermal image maps ((b) and (c)) were obtained following a plasmonic photoexcitation at 17 W/cm2 and 38 W/cm2 excitation power densities respectively, showing a maximal 16 ºC localized temperature rise at the injection site, allowing the skin sample to reach the maximum temperature of ~ 53 ºC. This essentially translates to a biological thermal imaging system in the temperature range of ~ 25-60 °C. Highly localized plasmonic heating is observable and mainly concentrated around the injection site. At a lower power density (17 W/cm2), no significant rise in skin temperature at the injection site were observed (Figure 1b). At 38 W/cm2, a highly localized temperature rise of 16 ºC at the GNR injection site were recorded, allowing the skin sample to reach a maximum temperature of ~ 53 ºC (Figure 1c). We noticed that the observed highly localized thermal effects must also be attributed to the collective heating effects of the GNR dispersions that can collectively induce a significant change in temperature. Our experimental findings were numerically proven by a realistic model based on the Navier-Stokes and thermal transfer equations [2]. At an excitation power density of 38 W/cm2, we theoretically predicted a temperature increase of 14 ºC relative to the background, which was in good agreement with our experimental results. The collective heating regime provides an excellent opportunity to controllably increase the temperature of a macroscopic region of tissue without thermal damage to cells and surroundings. The correlation of THz non-invasive imaging to temperature measurements allows us to develop a biological THz-based thermometer, so called “teramometer”. References [1] Jain, P. K., Huang, X., El-Sayed, I. H. & El-Sayed, M. A. “Noble metals on the nanoscale: Optical and photothermal properties and some applications in imaging, sensing, biology, and medicine.” Acc. Chem. Res. 41, 1578-1586 (2008). [2] Richardson, H. H., Carlson, M. T., Tandler, P. J., Hernandez, P., Govorov, A. O. “Experimental and theoretical studies of light-to-heat conversion and collective heating effects in metal nanoparticle solutions.” Nano Lett. 9, 1139-1146 (2009). Study of N-rich Plasma Polymer Films as a Biomaterial for Endovascular Coiling Madhuwanthi Buddhadasa*, Sophie Lerouge**, Pierre-Luc Girard-Lauriault* *Plasma Processing Laboratory, Department of Chemical Engineering, McGill University, Montreal, QC, Canada **Laboratory of Endovascular Biomaterials (LBeV), CHUM research Centre (CRCHUM) & Department of Mechanical Engineering, ÉTS, Montreal, QC, Canada Endovascular coiling is the commonly used treatment technique for a brain aneurysm, a focal dilation of an artery in the brain. It involves the placement of platinum based coils such as, Guglielmi detachable coils (GDCs), in the aneurysm which promotes thrombosis within, separating it from the main blood flow and preventing it from further growth and rupture. Due to several reasons, one of which could be the relative inertness of Pt, complications such as, recanalisation of the aneurysm leading to regrowth and rupture, may take place. This has been a motivation for our interest in studying the feasibility of employing a plasma polymer (PP) as a coating on the existing standard GDCs, in order to improve the healing and cure of aneurysms by endovascular coiling. We choose to study N-rich PP films, more specifically films containing amine functionalities which, owing to their positive charge under aqueous media of physiological pH, are found to attract negatively charged biological species such as blood plasma proteins. These PPs are deposited in a plasma enhanced chemical vapour deposition system, utilising a hydrocarbon (HC) gas such as, ethylene, 1,3-butadiene or a mixture of both, and a functional group containing gas, ammonia. Plasma parameters such as gas flow rates, gas flow ratio and plasma power have been optimised to yield coatings with high amine content as well as those that are stable in aqueous media which would be a vital requirement for bio-applications. In this work, our aim is to study the thrombogenicity and relevant mechanical properties such as friction and resistance to wear against a microcatheter material surface, of these PP films, deposited using different HC gases and compare them with Pt surfaces. As a first step towards thrombogenicity testing, we performed protein (fibrinogen) adsorption experiments using surface plasmon resonance spectroscopy which allows one to investigate the kinetics of protein adsorption in real time, determine the adsorbed layer thickness and surface density. Study of these properties will be important to initiate the development of a suitable plasma polymer coated GDC for the treatment of brain aneurysms. Rotational and vibrational temperatures in DBD’s for material processing: application to the paper plasma treatment. A. Ionascut-Nedelcescu1, A. M. Cardini1 1 Bishop’s University, Department of Physics, 2600 College, Sherbrooke, Qc., J1M1Z7, Canada. In this work, a detailed analysis of the rotational and vibrational temperatures (Tr and Tv) of an atmospheric pressure DBD plasma is presented in conjunction with the analysis of plasma treated paper sheets. Both Tr and Tv are deduced from the resolved spectra, by employing the Boltzmann plot method. For Tr the First Negative System of the N2+, B (2∑u+, v=0) → X (2∑g+, v=0) transition is used, while for Tv the (2, 5), (1, 4), and (0, 3) transitions of the N2 Second Positive System, C3Πu → B3Πg are employed. In the first part, an analysis of the main excitation mechanisms with emphasis on the rotational band of the molecular nitrogen ion is presented. In the second part, the variation of both Tr and Tv with plasma’s applied voltage is analysed. In the third part a series of identical paper samples are treated in the same voltage range as that employed for Tr and Tv. Optical microscopy is used to analyze the effect of the plasma on the samples surfaces. Randomly distributed pores are noticed to appear on the surface. In order to quantify the effect of the plasma treatment on the samples, the total area of the pores relative to the whole treated area, is analyzed. It is noticed that neither Tr nor Tv are affected by the voltage, in the range of values studied here, while the total area of the pores is voltage dependent. Finally, it is concluded that the major effect of the plasma on the samples is predominantly due to the electrons, while the heavy particles contribution is negligible. VO2 based light-weight tunable radiator for space applications J. Chaillou1, A. Hendaoui2, N. Émond1, B. LeDrogoff1, É. Haddad3, M. Chaker1 1INRS – Centre Énergie, Matériaux, Télécommunications, Varennes (Canada) 2Alfaisal University, Riyadh (Saudi Arabia) 3MPB Communications Inc., Pointe-Claire (Canada) In the last decade, the market of nanosatellites (<10kg) skyrocketed with tens of launches each years. While in orbit, the external temperature vary between -150°C and 150°C, it is thus imperative to regulate the internal temperature of the satellite between -10°C and 30°C to ensure reliable operation of the electronic equipment. Thermal control devices are actually made of bulk metal and are mechanically actuated, so they are not suitable for nanosatellites as they increase both the satellite weight and energy consumption. An innovative approach, the smart radiator device (SRD), has been developed for the nanosatellite passive thermal control. It consists of a thin “smart” coating relying on vanadium dioxide (VO2) phase transition. This thermochromic material abruptly changes from an IR-transparent semiconducting state to an IR-reflecting metallic state at a temperature TSMT around 68°C. The SRD is made of an IR-reflecting substrate, a quarterwave layer (λ/4) made of an IR-transparent material and a very thin film of thermochromic VO2. Across VO2 phase transition, the device switches from a low-emissivity state to a high-emissivity state. The feasibility of such SRD has already been demonstrated [1]. In this work, we use mirror-polished aluminium as a reflecting substrate. We demonstrate how the device performance could be enhanced by using a highly IR-transparent material (CaF2) as a λ/4 layer to achieve a large contrast between the low temperature emissivity (εL≈0.20) and the high temperature emissivity (εH≈0.73). Finally, we have developed an IR-transparent and UV-Vis multilayer reflective filter that reduces the heat intake generated by exposition to sunlight, making our SRD more thermally efficient. Amorphous silicon was selected as high-index material and CaF2 as low-index material. [1] A. Hendaoui et al. Applied Physics Letters 102, 061107 (2013) Modèle avancé pour la résolution numérique de l’équation de Boltzmann dépendant du temps pour les plasmas froids d’hélium J. Claustre, C. Boukandou-Mombo, R. Jbilat, J.-P. Matte, F. Vidal INRS - Énergie, Matériaux et Télécommunications, Varennes, Québec. Nous présentons ici un modèle unique pour la simulation de plasmas de décharges pour le gaz d’hélium, i.e avec un faible degré d’ionisation et ou les espèces neutres et les ions ont une température nettement plus faible que celles des électrons. Deux équations sont résolues dans ce modèle: La résolution de l’équation de Boltzmann dépendant du temps, à partir de laquelle la fonction de distribution en énergie des électrons est obtenue, et l’équation d’évolution des populations des différents états excités (i.e. aussi appelée équation de taux) de l’hélium. Une des difficultés dans la simulation de tels plasmas est due au grand nombre d’états atomiques excités qui doivent être pris en compte ainsi que les sections efficaces des nombreux processus qui interviennent (incluant les collisions d’excitation-déexcitation, d’ionisation, de recombinaison, les processus radiatifs, l’absorption de l’énergie électromagnétique, etc.) et ceci de manière appropriée [1]. De plus, nous avons développé un schéma d’interpolation qui satisfait la conservation des grandeurs physiques (i.e. conservation de l’énergie et des particules) pour tous les processus ayant lieu dans le plasma d’hélium et qui permet de prendre correctement en compte les bonnes valeurs des seuils d’énergies pour chaque processus décrit sur une grille discrétisée en énergie, ce qui n’est généralement pas le cas dans les modèles existant cités dans la littérature. Un des résultat majeur de ce modèle est la caractérisation en fonction du temps des populations (tel que les métastables ou les dimers) dans les plasmas pulsés, i.e. plasmas largement utilisés dans de nombreuses applications industrielles et de recherche depuis un peu plus d’une dizaine d’année. Depuis peu de temps, plusieurs groupes de recherche s’intéressent aux plasmas pulsés haute fréquence (pulsations de l’ordre de dizaines de nanosecondes) [2]. Nous illustrons certains résultats de ces plasmas hautement dépendant du temps. [1] M. Santos and C. Noel and T. Belmonte and L. L. Alves, J. Phys. D: Applied Physics 47, 26520 (2014) [2] J.L. Walsh , F. Iza , and M.G. Kong Eur. Phys. J. D 60, 523-530 (2010) Epitaxially stabilized thin films of the potentially multiferroic materials ε-Fe 2 O3 and ε-Alx Fe 2-x O3 . 1 1 L. Corbellini , C. Harnagea , C. Lacroix2 , D. Menard3 and A. Pignolet1 1 Institut National de la Recherche Scientifique, Université du Québec Varennes, Québec, Canada J3X 1S2 2 Department of Electrical Engineering, Polytechnique Montréal, Montréal, Québec, Canada H3C 3A7 3 Department of Engineering Physics, Polytechnique Montréal, Montréal, Québec, Canada H3C 3A7 ε-Fe2 O3 is a metastable intermediate phase of iron (III) oxide, between maghemite (γFe2 O3 ) and hematite (α-Fe2 O3 ). Epsilon ferrite has been investigated essentially because of its ferrimagnetic ordering with a Curie temperature of circa 500 K [1]. However, given its orthorhombic crystal structure that belongs to the non-centrosymmetric and polar space group Pna21 , it should exhibit ferroelectric behavior along with magnetoelectric coupling of the two orders (potentially making it one of the few room temperature multiferroic materials) [2, 3]. Moreover, the material is characterized by strong magnetic anisotropy, resulting in a ferromagnetic resonance (FMR) frequency in the THz range in the absence of magnetic field and at room temperature. This is of particular interest given its potential use in short-range wireless communications (e.g. 60GHz WiFi) and ultrafast computer non-volatile memories [4, 5]. Due to its metastable nature, ε-Fe2 O3 needs to be stabilized at room temperature: to date such feature has been obtained mainly by synthesizing it by sol-gel as nanoparticles embedded inside a SiO2 matrix, with the stabilization mechanism being either pressure or size confinement (or both). Recently however, deposition of epitaxial thin films of εFe2 O3 on SrTiO3 (111) was demonstrated [6]; in this case the stabilization is thought to be due to both epitaxial strain and interface interaction between the substrate and the film. We report the growth by Pulsed Laser Deposition of epitaxial thin films of ε-Fe2 O3 and ε-Alx Fe2-x O3 on different single crystal substrates, both oxides (SrTiO3 , LaAlO3 , LSAT, and YSZ) and non-oxides (single crystal Silicon), and discuss the influence of the chosen substrate and of aluminum doping on the structural, magnetic and dielectric properties. In particular, we focused our attention on the effect of Al inclusion inside the ε-Fe2 O3 lattice, which should result (i) in the improvement of the electric properties, given the good ferroelectric properties of the isostructural AlFeO3 , and (ii) in a lowering of the FMR frequency due to non-magnetic nature of Al. [1] S. Ohkoshi et al., Angew. Chem. Int. Ed. 46, 8392 (2007); [2] E. Tronc et al., J. Solid State Chem. 139, 93 (1998); [3] M. Gich et al., Nanotechnology 17, 687 (2007); [4] M. Nakajima, A. Namai, S. Ohkoshi, T. Suemoto, Optics Express 18, 18260 (2010); [5] C.H. Back et al., Science 285, 864 (1999); [6] M. Gich et al., Appl. Phys. Lett. 96, 112508 (2012). [5] S. Ohkoshi, et al., J. Am. Chem. Soc. 131, 1170 (2009). Modeling of electromagnetic near field interactions with anisotropic materials in TipEnhanced Raman Spectroscopy C. Dab1, G. Kolhatkar1, J. Plathier1, and A. Ruediger1 1 Institut National de la Recherche Scientifique – Centre Énergie, Matériaux, Télécommunications, 1650 Boulevard Lionel-Boulet, Varennes, Québec, J3X 1S2, Canada Contact author: [email protected] Abstract Tip-Enhanced Raman Spectroscopy (TERS) is a very promising field of research that has attracted increasing attention over the last few years [1]. This technology combines the strengths of scanning probe microscopy with those of optical spectroscopy to achieve a high spatial resolution and signal amplification. TERS consists in externally focusing a laser beam on a metallic tip generating an amplified optical near field [2]. The structural and chemical properties of Raman-active nanomaterials can then be studied in depth. In this work, we numerically simulate the electric amplification of a gold tip on PbTiO3 using FEM numerical method for both the ferroelectric and the paraelectric phase. We present an in depth study of the effect of the tip parameters on the electrical field. We focus on gold as the noble metal composing the tip due to its plasmonics propreties in the visible to near infrared (NIR) and the fact that it is still the material of choice in most TERS experiments due to the chemical instability. The dielectric function of gold has a large negative part with a small imaginary part in this spectral rang, leading to strong enhancement radii in the range of typical scanning probe tips. Lead titanate PbTiO3 thin film grown on a platinum island were used as sample surface in this study. PbTiO3 is known to be a ferroelectric room temperature with a possible size-driven phase transition into the paraelectric phase . Our simulations confirms the known dependence of the surface plasmon polariton peak as a function of distance and in addition shows that typical experimental configurations should be sensitive to changes of refractive index of about 10% as e.g. observed between the ferroelectric and the paralectric phase of PbTiO3. Keywords: Tip-Enhanced Raman Spectroscopy (TERS), FEM numerical method, field enhancement, Surface plasmon polariton [1] Norihiko Hayazawa, Yasushi Inouye, Zouheir Sekkat, Satoshi Kawata,’Metallized tip amplification of near-field Raman scattering’, Optics communications, 183, 333-336, (2000) [2] A. Campion, and P. Kambhampati, 'Surface-enhanced Raman scattering', Chemical Society Reviews, 27, 241-250, (1998). Déposition de couches minces de TiO2:W,N par un procédé de co-pulvérisation-magnétron réactive pour le développement de photoanodes actives sous lumière visible N. Delegan,1 R. Pandiyan,1 A. Dirany,2 P. Drogui,2 and M. A. El Khakani 1,* 1 2 Institut National de la Recherche Scientifique, Centre-Énergie, Matériaux et Télécommunications, 1650 Blvd. Lionel-Boulet, Varennes, QC J3X-1S2, Canada Institut National de la Recherche Scientifique, Centre-Eau, Terre et Environnement, 490 Rue de la Couronne, QC G1K-9A9, Canada *e-mail: [email protected] Nous avons développé un procédé de co-pulvérisation-magnétron réactive pour la synthèse et le dopage in situ au tungstène (W) et à l’azote (N) de couches minces de TiO2:W,N photoactives dans le visible. Les dopants ont été incorporés sur une large plage de concentrations, notamment de 0-3 at.% et 0-9 at.% pour le W et le N, respectivement. L’objectif du codopage W,N est d’élaborer des couches minces photoactives dans le visible et passivées électroniquement. Les analyses XPS nous ont permis de démontrer que les dopants s’incorporent principalement dans la matrice de TiO2 de façon substitutionnelle, créant ainsi des niveaux énergétiques associés avec l'absorption dans le visible. Par ailleurs, les analyses XRD ont démontré que le co-dopage TiO2:W,N produit une certaine relaxation des contraintes internes de la structure anatase présentes dans les couches minces de TiO2:W et TiO2:N. En effet, la présence du W comme codopant réduit la densité des lacunes d’oxygène (associées avec le monodopage de type TiO2:N), et minimise ainsi le piégeage des photocharges. Les études par spectroscopie UV-Vis ont confirmé une réduction significative de la bande interdite optique (Eg) de 3.2 eV jusqu’à ~2.3 eV pour un dopage optimum du TiO2:N et du TiO2:W,N. Les mesures par UPS des fonctions de travail et la localisation du niveau de Fermi (EF), du minimum de bande de conduction (CBM), et du maximum de bande de valence (VBM), pour les différents cas de mono- et de co-dopage nous ont permis de reconstruire les diagrammes de bandes, et de mieux comprendre les processus de génération de photocharges dans ces couches de TiO2:W,N. Finalement, nous avons pu confirmer l’efficacité de dégradation électro-photo-catalytique de l’atrazine (polluant réel), sous illumination solaire, par nos photoanodes à base de couches de TiO2:W,N. En effet, les photoanodes à base de TiO2:W,N dégradent ~98% de l’atrazine (60 ppb initiale) après à peine 37 min d’illumination, soit ~2 fois plus rapidement qu’avec le TiO2:N. A “smart” material for “smart” applications, capitalizing on tunable phase transition characteristics of vanadium dioxide thin films N. Émond, A. Hendaoui and M. Chaker Institut National de la Recherche Scientifique (INRS), University of Quebec, 1650, Blvd. LionelBoulet, Varennes, Quebec J3X 1S2, Canada Vanadium dioxide (VO2) exhibits a reversible first-order semiconductor-to-metal transition (SMT) at a temperature of TSMT ≈ 68 °C. This transition is accompanied by a structural transition from a low-temperature (semiconductor) monoclinic phase to a high-temperature (metallic) tetragonal phase and characterized by a 3 to 5 orders of magnitude change in VO2 electrical resistivity and in significant changes in its reflectivity at both infrared (IR) and terahertz (THz) frequencies. Moreover, the SMT characteristics of VO2, namely the transition temperature, the sharpness of the transition, the amplitude of the properties modification and the related hysteresis width, can be efficiently tailored through doping and through a proper control of the crystallinity, the morphology and the stoichiometry of the films. VO2 thin films with a wide variety of SMT characteristics have been synthesized on different substrates using pulsed laser deposition, allowing to fully exploit this material for IR and THz applications. It was demonstrated that the SMT characteristics of polycrystalline VO2 films in the THz range can be efficiently tailored through a proper control of the oxygen pressure during deposition, allowing for the development of THz “smart” devices such as sensor-type and memories devices. The effect of W-doping on the SMT characteristics of VO2 films was also studied and resulted in a large reduction of TSMT. Advantage of this reduction was first taken to develop a new type of energy-efficient, light-weight, and high-performance variable-emittance coatings based on WxV1-xO2 thin films (smart radiator device) that can passively control the internal temperature of nano-satellites close to room temperature. The SMT properties of WxV1xO2 films were further exploited to achieve a WxV1-xO2 multilayer structure (MLS), with a bottom-up gradient of tungsten content, which displays a combination of excellent electrical characteristics and presents a great potential for the development of highly responsive sensing layer in energy-efficient uncooled microbolometer. Theoretical and Experimental Characterization of Optical Grating Coupler F. Fesharaki 1, N. Hossain2, S. M. H. Kabir2, S. Vigne2, M. Chaker 2, and K. Wu1 1 2 Poly-Grames Research Center, École Polytechnique de Montréal, Montréal (Canada) INRS – Centre Énergie, Matériaux, Télécommunications, Varennes (Canada) Grating coupler, a region on top of or below a waveguide where there is a grating, is a kind of structure in which guided-mode resonance takes place. Once designed accurately, resonance happens for specific combinations of incident angles and light frequency and allows the grating to couple light into a guided mode of the waveguide. In this work, a rigorous three-dimensional simulation of a grating coupler is conducted for the first time. As a result, guided wave characteristics of an out-of-plane grating coupler are studied in detail and leakage characteristics, radiation pattern and the coupling efficiency are evaluated. Silicon on Insulator (SOI) wafer- with a 260 nm silicon layer and 2 µm buried oxide (BOX) - was utilized in our design and fabrication. Two different periods were considered, resulting in two slightly different coupling angles. Test structures with grating couplers and tapered strip waveguides were fabricated. Electron Beam Lithography (EBL) (Vistec VB6 UHR-EWF) and Inductively Coupled Plasma – Reactive Ion Etching (ICP-RIE) (Oxford PlasmaLab System100) were used for the fabrication of our device based on the SOI substrate. Because the fiber couplers require a different etch depth than the other optical structures, they have to be fabricated in a separate process step. Two sets of alignment marks for this twolevel microfabrication steps were then first patterned by EBL in positive electron beam resist ZEP520a and transferred into the top Si layer using a SF6/C4F8 ICP etch chemistry. Optical end-point detection system stopped the etching process when the BOX is reached, to maximize the contrast during subsequent EBL exposures. The sample was then cleaned, same positive resist was spin coated and the grating couplers were patterned by EBL using a first set of alignment marks. The fabricated samples were characterized by various coupling angles over 100 nm wavelength spectrum. The fabricated grating couplers show a coupling efficiency higher than 35% over 50 nm wavelength bandwidth. The optimized coupling angles are 7.5° and 12° for the 580 nm and 600 nm grating periods respectively, in agreement with the full-wave simulation values of 7° and 13°. The corresponding coupling efficiencies were 42% and 38 %. This excellent agreement between theory, simulation and experiment fully validates the design and fabrication method. 1/1 Strong magnetization of laser-produced plasmas as a new tool for investigating astrophysics and fusion physics J. Fuchs LULI, École Polytechnique, CNRS, CEA, UPMC, F-91128 Palaiseau, France. Coupling high-power lasers and high-strength B-fields helps gaining unique insight and understanding of a variety of phenomena of crucial importance for astrophysics and Inertial Confinement Fusion. We have shown that such platform could be used to mimic the expansion of a young star isotropic disk wind threaded by a co-axial poloidal magnetic field. It reveals that long-range collimated jets can indeed by result from such system, complementing toroidal B-fields that help shape the initial matter from the star into a jet. The same system can then be used to study the dynamics of the accretion of magnetized plasma columns onto star surfaces and help decipher the underlying physics, or also the issue of particle energization in astrophysical plasmas. But it can also serve as a test-bed to evaluate the impact of B-fields onto ICF plasmas, a topical subject since it has been recently shown that such magnetization could help increase the temperature of ICF cores, opening a path for potential increase of ICF experiments energy gain. IMPACT OF HEXAMETHYLDISILOXANE INJECTION ON THE ELECTRON TEMPERATURE AND EXCITATION IN LOW-PRESSURE RF PLASMAS WITH CYCLIC FORMATION & DISPEARRANCE OF DUST Vincent Garofano1, Luc Stafford1, Bernard Despax2, Richard Clergeraux2 and Kremena Makasheva2 1 Université de Montréal, Montréal, Québec H3C 3J7, Canada 2 LAPLACE (Laboratoire Plasma et Conversion d’Energie), Université de Toulouse, CNRS, UPS, INPT, 118 route de Narbonne, F-31062 Toulouse 09, France Optical emission spectroscopy was used to analyze the very-low-frequency cyclic evolution of the electron energy and density caused by repetitive formation and loss of dust nanoparticles in argon plasmas with pulsed injection of hexamethyldisiloxane (HMDSO, [CH3]6Si2O). Optical emission spectra were recorded in the dust cloud. A first wavelength interval containing close Ar emission lines around 600 nm emanating from Ar excited states close to the ionization level was used to construct a Boltzmann diagram. On the second hand, by introducing a trace of rare gases (20% Xe, 20% Kr, 20% Ar, and 40% Ne) in the nominally pure Ar plasma, trace-rare gases optical emission spectroscopy measurements could be performed for wavelengths between 750 and 900 nm. The measured emission intensities of Ar, Kr, and Xe were then compared to the predictions of a collisional-radiate model, with the electron temperature as the only adjustable parameter. These two methods gave temperatures characterizing the high and low energy part of the electron population. Relative electron densities were also estimated from relative line emission intensities. Both temperatures rose when dust occupation increases, and then decreased when dust is lost. The opposite trend was observed for the electron density [1]. Such cyclic behaviors of the electron energy and electron density in HMDSO-containing plasmas is in good agreement with the evolution processes in dusty plasmas, in which the formation of negative ions followed by electron attachment on nanoparticle's surfaces are critical phenomena driving dust growth. Evolution of the very-low frequency describing this cyclic behavior with the operating parameters is also investigated. While the frequency unsurprisingly increases with total pressure and HMDSO flow, it decreases with power, a feature that has yet to be understood. [1] V. Garofano, L. Stafford, B. Despax, R. Clergereaux, and K. Makasheva, “Cyclic evolution of the electron temperature and density in dusty low-pressure radio frequency plasmas with pulsed injection of hexamethyldisiloxane,” Appl. Phys. Lett., vol. 107, no. 183104, pp. 0–5, 2015. NumericalModelingofNanodustyPlasmas StevenL.Girshick DepartmentofMechanicalEngineering,UniversityofMinnesota Minneapolis,MN,USA Abstract Nonthermalplasmasinwhichnanoparticlesnucleateandgrow—“nanodusty” plasmas—presentarichvarietyofphysicalandchemicalphenomena,manyofwhichare poorlyunderstoodinadditiontobeingcoupledtoeachother.Theabilitytopredictthe spatiotemporalevolutionofsuchplasmaspresentsanenormouschallengetonumerical modeling.Inthistalkanoverviewwillbegivenofthestatusofsuchmodeling,withafocus onradiofrequencysilane-containingplasmasthatareusedforsynthesisofsilicon nanoparticles.Phenomenaconsideredincludeparticlenucleation,growthbyphysicalor chemicalvapordepositiononparticlesurfaces,coagulation,particlecharging,nanoparticle transportbyneutraldrag,electrostaticforces,iondrag,Browniandiffusion, thermophoresisandgravity,andtheself-consistentcouplingoftheaerosolphasetothe plasmabehavior.Modelsofdifferentdegreesofcomplexitywillbediscussed,aswellasthe computationalchallenges. Étude de la physico-chimie et de l'architecture de revêtements d'hydroxyapatite élaborés par projection de suspension dans un plasma inductif Frederic Faivre1-2, François Gitzhofer1, Ghislaine Bertrand2, David Grossin2, Cédric Charvillat2, Olivier Marsan2 1. Université de Sherbrooke, Laboratoire de génie des plasmas, Sherbrooke, Qc, Canada 2. CIRIMAT, Université de Toulouse, CNRS, INPT, UPS, Toulouse, France Mots Clés : hydroxyapatite, plasma RF, suspension, revêtement, Rietveld, Raman. RESUME Les revêtements d'hydroxyapatite (HA), Ca10(PO4)6(OH)2, réalisés par projection plasma atmosphérique conventionnelle (APS), sont largement utilisés pour améliorer l’intégration des prothèses osseuses Leurs excellentes biocompatibilité et ostéconductivité ont un effet positif sur la repousse osseuse au début de l'implantation. Cependant, la stabilité à long terme est toujours controversée. En effet, la poudre projetée se décompose dans le plasma et forme un dépôt avec une forte hétérogénéité chimique et structurale (présence de phase amorphe à l'interface avec le substrat). Des caractéristiques telles que la composition chimique, la cristallinité, les phases cristallographiques et leur répartition dans l’épaisseur mais surtout aux interfaces os/revêtement et revêtement/titane ont donc été identifiées comme ayant une forte influence sur la durée de vie de ce type de revêtement. La projection de suspension dans un plasma RF est un procédé assez versatile pour permettre de développer un nouveau revêtement aux propriétés, qui influencent la durée de vie de l’implant, maîtrisées. En outre, ce procédé permet de s’affranchir de l'étape de production d'une poudre grâce à la formulation d'une suspension directement projetable. L'objectif de cette étude est de mesurer l'influence des paramètres opératoires (pression, puissance, distance de projection) sur les propriétés physico-chimiques, structurales et architecturales du dépôt. Le challenge de cette étude est de réaliser une caractérisation assez précise pour identifier, quantifier et localiser les différentes phases. Les paramètres opératoires ont un fort impact sur les caractéristiques du revêtement ce qui nous permet de les contrôler. Ainsi, nous avons réussi à obtenir des dépôts composés d'une phase majoritaire d'HA modulable de 40 à 90% en masse et le reste étant composé d'un mélange non exhaustif de tri calcium de phosphate (α ou β-TCP), d'oxyde de calcium (CaO) et de tétra calcium de phosphate (TTCP). De plus, les tailles des cristallites d’HA sont également contrôlables tout en restant nanométrique (30 à 60 nm) comme ont pu le prouver les caractérisations par diffraction des rayons X. Une phase d'oxyapatite (OA) ainsi que la présence de phosphate de calcium amorphe (ACP) ont été mises en évidence par spectroscopies infrarouge et Raman. La cartographie d’une coupe transversale d’un dépôt par spectroscopie Raman a révélé une décroissance de la contribution des phases amorphe et oxyapatitique dans l’épaisseur vers le substrat. Plasma-Quebec 2016 1-2 June 2016, Montreal Re-sputtering effect in on-axis RF-magnetron sputtered of SrTiO3 thin films from single stoichiometric target Azza Hadj Youssef1, R. Nouar2, A. Sakissian2, R.Thomas1 and A. Ruediger1 1 Nanoelectronics-Nanophotonics, 2 Plasmionique Inc Centre Énergie Matériaux et Télécommunications, INRS, 1650 Lionel-Boulet, Varennes, Québec, J3X1S2, Canada Abstract SrTiO3 in the perovskite structure is a very attractive material for application in microelectronics not only because of its high charge storage capacity and good insulating properties but also as a wide-gap semiconductor with a band gap of ~ 3.2 eV. It has also attracted interest in the world of oxide electronics, in particular as a substrate for heteroepitaxy. In this work strontium titanate thin film deposition was performed by an on-axis RF-magnetron sputtering technique. The thin film growth process was systematically studied to achieve stoichiometrically grown films. The growth of SrTiO3 thin film showed undesired substrate etching due to the production of negative oxygen ions. The onaxis geometry used in the present study accelerated re-sputtering. At high RF-power, surface etching has been observed at the center of the substrate and the diameter of this etched circle was similar to the diameter of the target. However, deposition was possible in regions outside this etching zone. To achieve stoichiometric SrTiO3 thin film deposition at the axis-center, deposition pressure was adjusted to limit the effect of these negative ions to a minimum Polycrystalline growth of SrTiO3 thin films on platinized silicon substrates was optimized systematically and further extended to the epitaxial deposition on single crystal MgO substrates. The stoichiometry and surface morphology were investigated by X-ray photoelectron spectrometry (XPS) and atomic force microscopy (AFM), respectively. Structural investigations were done by Raman spectroscopy and X-ray diffraction (XRD). New multiferroic thin films based on tetragonal tungsten bronze structure Ba2LnFeNb4O15 (Ln = Eu and Sm) deposited by pulsed laser deposition T. Hajlaoui1, C. Harnagea1, and A. Pignolet1 1 Institut National de la Recherche Scientifique – Centre Énergie, Matériaux, Télécommunications, 1650 Boulevard Lionel-Boulet, Varennes, Québec, J3X 1S2, Canada Contact author: [email protected] (Thameur Hajlaoui) The study of Ba2LnFeNb4O15 (TTB-Ln) bulk ceramics revealed that they have a tetragonal tungsten bronze crystal structure, are ferroelectric and that a magnetic phase of barium hexaferrite BaFe12O19 (BaFO) spontaneously forms within the TTB-Ln phase during the ceramic processing, resulting in a novel multiferroic composite material at room temperature. Our goal is to investigate new room-temperature multiferroic thin films grown by pulsed laser deposition (PLD), namely thin films of the spontaneously forming composite BaFO/TTB-Ln (Ln = Eu and Sm). c-oriented thin films of TTB-Ln have been successfully grown on Nb doped SrTiO3(100) substrates by PLD. In specific and optimized growth conditions, the structural study of the BaFO/TTB-Ln thin films shows an epitaxial growth perpendicularly to the substrate plan and parallel to the c-axis of tetragonal crystal structure. Further structural analysis reveals two kinds of azimuthal orientation of the c-axis oriented grains of TTB-Ln onto the cubic substrate, with the a and b axes of TTB-Ln aligned at 18° with respect to the a-axis of the cubic substrate. Ferroelectric macroscopic hysteresis loops demonstrate the existence of a spontaneous polarization at room temperature. An enhancement of the ferroelectricity due to the epitaxial growth has been evidenced. To further study the ferroelectricity in TTB-Ln thin films, local electromechanical properties were studied using piezoelectric force microscopy. These experiments allowed determining the piezoelectric coefficient and confirming that the ferroelectric nature of the studied thin films is conserved down to the nanoscale. Finally, the magnetic properties of BaFO/TTB-Ln thin films were studied which reveals that the PLD grown BaFO/TTB-Ln composite films exhibit a ferromagnetic behavior at room temperature, confirming their multiferroic nature at room temperature. Photovoltaic Properties of Multiferroic Bi2FeCrO6 Based p-i-n Heterojunctions with p-Type and n-Type Oxides Wei Huang1, Riad Nechache2, Catalin Harnagea1, Mohamed Chaker1 and Federico Rosei1,3 1 INRS -Centre Énergie, Matériaux et Télécommunications, 1650, Boulevard Lionel-Boulet, Varennes, Québec J3X 1S2, Canada. 2 École de Technologie Supérieure, 1100 Rue Notre-Dame Ouest, Montréal, Québec H3C 1K3, Canada. 3 Center for Self-Assembled Chemical Structures, McGill University, 801 Sherbrooke Street West Montreal, Québec H3A 2K6, Canada Multiferroic materials are increasingly being studied for solar energy conversion technologies due to their efficient ferroelectric polarization-driven carrier separation and above-bandgap generated photovoltages. Multiferroics possess a magnetic order parameter besides the ferroelectric one and the electron–electron interaction governing the magnetic ordering induced a smaller gap than the other ferroelectric materials, leading to higher photovoltaic (PV) efficiencies. Recently, our group reported the power conversion efficiency of 8.1% for Bi2FeCrO6 (BFCO) thin-film solar cells with tunable bandgap of multiferroic oxides by engineering the cationic Fe/Cr ordering. However, the low band-gap BFCO with high cationic Fe/Cr ordering showed very weak ferroelectric properties, resulting in reduction of separation of photogenerated charge carriers and probably increase of recombination of electrons and holes, thus hindered the effective transport of photogenerated carriers. To enhance the internal electric field in highly ordered, low band-gap BFCO, a sandwich structure of p-i-n heterojunctions is designed. In this p-i-n junction, the multiferroic thin film acting as intrinsic absorber is sandwiched between p- and n-type semiconductor oxides as hole- and electron- collecting layer, respectively, so that the depletion regions at the p-i and i-n are added up and an internal field is formed across the entire layer of multiferroic material. In this work, we have used highly ordered BFCO as an absorber. Inorganic oxides, such as In-doped SrTiO3, NiO or MoO3 as a p-type hole-collecting layer and Nb-doped SrTiO3 or Al-doped ZnO as an n-type electron-collecting layer, have been used along with the multiferroics to form a p-i-n heterojunctions PV device. Keywords: photovoltaic, multiferroic, perovskite, heterojunction, power conversion efficiency. Presenting author’s email: [email protected] Polarisation nucléaire d'hélium 3 par pompage optique et échange de métastabilité Rhanem Jbilat*, François Vidal* * Institut National de la Recherche Scientifique L'hélium 3 (3He) est un isotope rare de l'hélium dont le noyau possède deux protons et un seul neutron. Du fait de son nombre impair de nucléons, le noyau d'3He possède un spin non nul et un gaz d’3He est dit polarisé lorsqu’une grande proportion des spins nucléaires est orientée dans la même direction. L'3He polarisé a des applications intéressantes, notamment dans le domaine médical, industriel ou de recherche. Il est employé par exemple dans de nouvelles techniques d'imagerie par résonance magnétique nucléaire (IRMN). L'3He peut être polarisé notamment par Pompage Optique et Échange de Métastabilité (POEM), qui consiste en un transfert de moment angulaire d'un laser polarisé circulairement du niveau métastable 23S1 vers le niveau 23P, suivi d'un échange collisionnel dit de métastabilité entre le niveau 23S1 et le niveau fondamental de l’hélium. Dans le cadre de notre projet de développement d’un modèle collisionnel et radiatif du plasma d’hélium, je me concentre sur la modélisation du POEM. Le modèle de POEM que je considère traite la dynamique temporelle des populations des différents sous niveaux hyperfins du niveau métastable 23S1 et du niveau 23P, en plus de celle du taux de polarisation. Il tient compte de différents phénomènes, notamment le pompage optique, les émissions stimulées et spontanées, l'échange de métastabilité et l’établissement de la polarisation, et se ramène à un système d'équations différentielles ordinaires couplées. Pour résoudre ce système, j'utilise des méthodes numériques que je programme avec le langage Fortran. Les programmes demandent une bonne capacité de calcul en raison des échelles de temps très différentes présentes dans le POEM (entre 10-8 s pour le pompage optique et 10 s pour l'établissement de la polarisation du gaz). Mes résultats montrent la possibilité d'obtenir un taux de polarisation de l'ordre 70%. Aussi, l'étude paramétrique permet d'analyser le rôle des différents paramètres intervenant dans le modèle. Ce modèle de POEM sera ultérieurement intégré dans notre modèle collisionnel et radiatif complet du plasma d’hélium. Cela fera le sujet de ma présentation d’aujourd'hui. Bienvenue à tous! Effet de l’eau et de la chaleur sur la stabilité de couches minces organiques déposées par plasma pour la fonctionnalisation des NTCs multi-parois L. Jorge, P.-L. Girard-Lauriault et S. Coulombe Laboratoire des procédés plasmas (PPL), Département de génie chimique, Université McGill, Montréal (QC), Canada L’adsorption de surfactants et de polymères sur la surface des nanotubes de carbone (NTCs) est une technique fréquemment utilisée pour la préparation de nanofluides (NFs) stables. Selon les groupements fonctionnels présents sur ces molécules ajoutées, il est ensuite possible d’y attacher des molécules plus complexes ou des nanoparticules (NPs) afin d’utiliser les NFs pour la détection de gaz ou des applications biologiques. Nous développons des NFs à base de NTCs multi-parois fonctionnalisés par plasma radiofréquentiel (RF, 13.56 MHz) à basse pression. Lors de l’exposition au plasma opérant à 35 W sous une atmosphère d’ammoniac, NH3, et d’éthylène, C2H4, les NTCs multi-parois sont recouverts d’une couche mince organique contenant environ 22 at% d’azote dont une partie sous forme d’amines primaires, -NH2. En remplaçant NH3 par du dioxyde de carbone, CO2, la couche déposée contient 22 at% d’oxygène et des groupes carboxyles, -COOH, tel qu’observé par spectroscopie de photoélectrons induits par rayons X. Des analyses thermogravimétriques sous atmosphère d’azote indiquent que ces couches organiques sont stables jusqu’à 150 oC, mais perdent les deux tiers de leur masse initiale lorsque chauffées à 550 oC. Ces couches organiques déposées par plasma peuvent aussi être exposées à l’eau, où elles sont alors partiellement oxydées, sans que cela affecte leur capacité à stabiliser les NTCs dans le NF. Dans l’eau, les groupes amines seront chargés positivement, formant –NH3+, alors que les groupes carboxyles seront chargés négativement, -COO-, ce qui permet de contrôler l’ajout d’autres nanoparticules sur les NTCs. Cela a été testé en observant la déposition d’une couche uniforme de NPs d’or chargées négativement sur les NTCs recouverts de la couche azotée mais aucune NP sur les NTCs fonctionnalisés par CO2. Pulsed Laser Deposition of CaxBa1-xNb2O6 thin film on GGG substrate S. M. H. Kabir1, N. Hossain1, F. Fesharaki2, K. Wu2, J. Margot3 and M. Chaker1 1 INRS – Centre Énergie, Matériaux, Télécommunications, Varennes (Canada) Poly-Grames Research Center, École Polytechnique de Montréal, Montréal (Canada) 3 Département de Physique, Université de Montréal, Montréal (Canada) 2 Calcium-barium niobate (CaxBa1-xNb2O6, CBN) thin film material has received great attention for the development of integrated optical components such as waveguides, Electro-Optic (EO) modulator, grating coupler, etc., owing to its promising electrical and optical properties. Previously, CBN thin film was synthesized on different substrates such as MgO, Nb:SrTiO3, as well as on Si using MgO as buffer layer. All those substrates are highly lattice mismatch to CBN and hence CBN thin film on those substrates were grown as domain matching technique which eventually limit not only the thin film material quality but also the device performance. To overcome these limitations, we have synthesized CBN thin film on closely lattice matched Gadolinium Gallium Garnet (GGG, Gd3Ga5O12) substrate by Pulsed Laser Deposition (PLD) technique. In our PLD experiment, a KrF excimer laser (248 nm, 16 ns pulse) was focused onto a commercially bought CBN-28 target. During deposition both the target and substrate were kept rotating. The laser fluency on the target was 2 J/cm2 with spot size of 0.07 cm2. The laser repetition rate and the targetsubstrate distance was 20 Hz, and 65 mm, respectively. At first, CBN deposition was carried out under various substrate temperature 650, 700, 750, and 800°C while keeping all other parameters constant. Xray diffraction (XRD) measurement shows the optimal growth temperature is 750°C where the most intensely (001) peak is found. Also, no secondary phases are detected in θ-2θ scan. Keeping this optimal temperature and other parameters constant, effect of oxygen partial pressure on CBN thin growth was also observed. For this, CBN deposition was carried out under various oxygen pressures ranging from 1 to 200 mTorr. Subsequently, the films were cooled down to bellow 100°C at cooling rate of 20°C per minute before taking out from vacuum chamber. Best CBN thin film was found at oxygen partial pressure of 50 mTorr. At this pressure, highly oriented in (00l) direction CBN thin film is found. At high ambient gas pressure the kinetic energy of the ablated species reduced due to the multiple collisions occurring with oxygen atoms or molecules. As a result, the impinging species do not have enough energy to migrate on the surface and they are mostly deposited without any particular rearrangement. Therefore, under high oxygen partial surface roughness increased significantly as well as porous thin film is grown. Furthermore, chemical composition of the deposited thin film was measured by X-ray photoelectron spectroscopy (XPS) which verify the stoichiometric transfer. 1/1 Bi2FeCrO6 deposition by hydrothermal synthesis and radio-frequency magnetron sputtering G. Kolhatkar1, F. Ambriz Vargas1, A. Sarkissian2, R. Thomas1, A. Ruediger1 Institut National de la Recherche Scientifique – Centre Énergie, Matériaux, Télécommunications, 1650 Boulevard Lionel-Boulet, Varennes, Québec, J3X 1S2, Canada 2 Plasmionique Inc., 1650 Lionel-Boulet, Varennes, Québec, J3X1S2, Canada 1 Contact author: [email protected] Abstract Multiferroics materials combine both ferroelectric/ferrielectric/antiferroelectric and ferromagnetic/ferrimagnetic/antiferromagnetic and/or ferroelastic properties at room temperature, making them suitable for non-volatile random access memories [1]. Amongst them, doubleperovskite Bi2FeCrO6 has been attracting a lot of attention. The double-perovskite nature of the crystal structure enhances the ferroelectric and ferromagnetic properties of the material. Furthermore, Bi2FeCrO6 displays interesting photovoltaic properties [2]. In this work, we study the deposition of Bi2FeCrO6 films. While most research previously reported used pulsed laser deposition or chemical solution deposition, our work focuses on two different, techniques: radio-frequency (RF) magnetron sputtering (°) +10 V and microwave-assisted hydrothermal synthesis. RF magnetron sputtering enables a -9 V higher film uniformity over a larger area, making it more favorable for the industry, while hydrothermal synthesis is highly 0 inexpensive and does not require any Figure 1 : 2 μm × 2 μm phase mapping of sophisticated equipment. Moreover, Bi2FeCrO6 on (111) STO deposited by hydrothermal synthesis is performed at low hydrothermal synthesis. temperature with a good stoichiometry control. The depositions were performed on (111) oriented strontium titanate (STO) substrates. For hydrothermal synthesis, bismuth nitrate (Bi(NO3)3), iron nitrate (Fe(NO3)3) and chromium nitrate (Cr(NO3)3) were used as precursors. A potassium hydroxide solution was used as a mineralizer. A commercially available 50%-50% BiFeO3-BiCrO3 target was utilized for the sputter deposition of double perovskite Bi2FeCrO6 films. The effects of deposition time, temperature and pressure as well as concentration on the Bi2FeCrO6 films are studied. Using hydrothermal synthesis, we demonstrate polarization switching, as illustrated in figure 1, attesting to the potential of this deposition technique. This comparative study will provide us with an alternative, cheap method to produce Bi2FeCrO6 films for multifunctional applications. 180 [1] [2] R. Ramesh, N. A. Spaldin, Nat. Mater. 2007, 6, 21. R. Nechache, C. Harnagea, S. Licoccia, E. Traversa, A. Ruediger, A. Pignolet, F. Rosei, Appl. Phys. Lett. 2011, 98, 202902. Superstructures dans le BiFeO3 J. Laverdière1, P. Lafontaine-Martel1, F. Rosei1, M. Chaker1 1 INRS – Centre Énergie, Matériaux, Télécommunications, Varennes (Canada) Il est bien connu que les matériaux cristallins sont fréquemment étudiés par diverses techniques de diffraction (rayons X, neutron, électrons, etc.) en raison de leur nature périodique. En diffraction de rayons X, la périodicité d'un réseau cristallin, i.e. la taille de sa cellule unité, est directement reliée à la position angulaire des ordres de diffraction des plans cristallins. Par exemple, le patron de diffraction de la solution solide de BiFe0.5Cr0.5O3 devrait être très similaire à celui du BiFeO3. Par contre, le Bi2FeCrO6, dans lequel les métaux de transition sont parfaitement ordonnés, possède une cellule unité deux fois plus grande, i.e. une fréquence spatiale deux fois plus petite. Son patron de diffraction présente donc des réflexions supplémentaires à des angles plus faibles, souvent appelées réflexions de superstructure. C'est pourquoi la diffraction de rayons X a été utilisé pour caractériser l'ordre cationique des matériaux dit pérovskites doubles [1–3]. Or, contre toute attente, les résultats de cet exposé révèleront que la diffraction de rayons X du BiFeO3 présente également des réflexions de superstructures. En utilisant différentes orientations de substrats de SrTiO3, nos comparerons l'effet des contraintes sur la structure. Nous montrerons qu'une distorsion monoclinique imposée par une contrainte compressive dans le plan (001) cause l'apparition d'une modulation du réseau dans toutes les directions <111>. Des hypothèses sur le mécanisme de relaxation seront proposées pour expliquer cette modulation. L'impact de l'existence d'une superstructure dans le BiFeO3 et la possibilité qu'elle soit impliquée pour relaxer des déficiences chimiques sera discuté. [1] [2] [3] B.-K. Kim and S.-Bae Cha, Mater. Res. Bull. 32, 743–747 (1997). J. Andreasson et al., , Phys. Rev. B 80, 075103 (2009) R. Nechache et al., Nat. Photonics 9, 61–67 (2014) 1 2016-04-12 Presentation at Plasma-Québec Title: Self-assembled and programmable electronic networks of VO2 nanodevices Authors: Dominic Lepage*, Jérémie Chaillou, Mohamed Chaker Affiliations: INRS Abstract: Materials exhibiting collective carrier dynamics can enable entirely new applications in solid state physics and lead to devices with drastically innovative functionalities. A canonical example of such correlated system is vanadium dioxide (VO2), which undergoes a semiconductor to metal phase transition via the application of heat, electricity or light-pumping. This presentation will highlight the nanometerscale functioning of a simple VO2 device consisting of two metal contacts on a polycrystalline VO2 layer deposited by Pulsed Laser Deposition (PLD). For layer thicknesses under 150nm, the resulting system is a self-assembled network of nanometric VO2 grains in a hexagonal compact configuration. For the 8x8µm samples presented, it is the interplay of 6400 connected grains that will result in the macroscopic observations. The initial state of the system is described in a probabilistic manner which is function of the substrate temperature. Furthermore, between any two grains, an innate barrier can arise from the local charge trapping by local gap states. As an electrical power is applied to the device, each individual grains can either be in the semiconducting or metallic state, depending on the local electron flux passing through them. Electrically conductive filaments and specific pathways can thus be grown within the layer as a function of local initial conditions, sustained via temperature or electrical current, and then reset. When the grains’ potentials are not externally fixed and the voltages free to change, the device can also present a negative differential resistance as the fraction of grains switching from semiconductor to metal are increasing. Simultaneously, charges are accumulating within the device, especially at metal-insulator interfaces forming local Schottky junctions which grow in a branching fractal manner if unguided. This leads to self-oscillations, where the charges at the grains interface accumulates and are spontaneously discharged, with frequencies as high as 9MHz. In this talk, we will show the measurements of current vs. voltage vs. temperature and of voltage vs. time that are used to deduce the physical properties of those grain junctions in all possible configurations. The current flowing through the network is then predicted by a self-consistent time-dependent electronic network model. Time-varying maps of the local current densities will illustrate how such simple VO2 layers can form an electronic network of nanodevices capable of complex behaviors. The presentation will end on an open talk on specific applications of such systems and potential methods for the large scale fabrication of phase transition metal oxides devices. 1|1 Anatase-phase titanium dioxide films deposited at atmospheric pressure using dielectric barrier discharge (DBD) Zineb Matouk1, Rocio Rincon1, Paul Brunet1,2, Françoise Massines2, Mohamed Chaker1 1 INRS, Centre Énergie Matériaux et Télécommunications, INRS, 1650 Lionel-Boulet, Varennes, Québec, J3X1S2, Canada 2 Laboratoire PROcédés Matériaux et Energie Solaire, UPR 8521, Tecnosud, 66100 Perpignan, France Titanium dioxide both bulk material and nanoparticules (TiO2 NPs) have been widely investigated because of their potential applications such as photochemistry or photocatalysis [1]. In this work, atmospheric-pressure Dielectric Barrier Discharge (AP-DBD) N2/N2O plasma was used to deposit TiO2 NPs. TiO2 NPs (20-30 nm in diameter and 20% rutile, 80% anatase) were dissolved in isopropanol and introduced into the plasma for the synthesis of the films. The morphology, the composition and crystalline structure of the deposited TiO2 films were investigated by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffraction, respectively. The results showed that the microporous films prepared by the DBD plasma deposition were rich enough in Ti with ~ 15%. Furthermore, the films were characterized as anatase TiO2 structures with (101) preferential orientation. For the first time with a plasma-based methodology, it is demonstrated that it is possible to obtain TiO2 anatase film without neither post treatment nor extra heating. Low temperature AP- DBD plasma has been demonstrated to be a fast and industrial-scalable method for the synthesis of TiO2 films. [1] R. Daghrir et al. Ind. Eng. Chem.Res.10 (2013) 52. * [email protected] Formation des stents biodégradables par technique de dépôt physique en phase vapeur (PVD) par arc électrique N. Y. Mendoza-González1, J.-L. Meunier1, T. Azar2 and R. Cecere3 1 Plasma Processing Laboratory (PPL), Chemical Engineering Department, McGill University, Montreal H3A 0C5 2 Mechanical Engineering Department, McGill University, Montreal H3A 0C5 3 Faculty of Medicine, Department of Surgery, Division of Cardiac Surgery, McGill University, Royal Victoria Hospital, Montreal, H4A 3J1 Ce travail présente des résultats préliminaires sur la voie de la création d'un nouveau stent métallique biodégradable à base de fer (Fe) et d’acier inoxydable (SS). Ces deux éléments, en tant que couple galvanique, fournissent des particules anodiques et cathodiques qui sont corrosives lorsqu’elles sont immergées dans un environnement salin (sang) conduisant ainsi à la biorésorption du stent. La construction du système composé de nanoparticules inter-mélangés de Fe et SS a été fait à l’aide d’un système industriel de dépôt PVD par arc (PVD Ionbond 350). Dans cette technique, des cibles métalliques de Fe et SS sont évaporées dans des conditions de vide et de polarisation contrôlées pour déposer un composite de nanoparticules inter-mélangés sur un substrat. La pression de dépôt est typiquement 1.2x10-2 Torr. Le faisceau d'ions à plasma a été généré par une décharge à arc à courant continu de 50 A avec 80 sccm d'argon comme gaz d'arrière-plan. Pendant toutes les étapes, le carrousel planétaire à l'intérieur de la chambre est mis en rotation à 2 tours par minute pour garantir que toutes les surfaces du substrat traversent les zones de plasma, conduisant à une épaisseur de revêtement uniforme. Des essais préliminaires ont été effectués en revêtant des nanoparticules métalliques sur des substrats en céramique avec 1) Fe, 2) SS et 3) le rapport de Fe-SS de 1:1. Une moyenne d'épaisseur de revêtement de 200 nm a été mesurée avec un profilomètre Dektak après un procédé de recouvrement de 25 minutes. La morphologie des échantillons a été observée avec microscope optique et microscope électronique à balayage (SEM). Les images SEM montrent en détail une structure formée par des particules inter-mélangées de SS et Fe à taille nanométrique et très peu de particules de taille micrométrique. Afin d'observer le processus de biodégradation, les échantillons ont été immergés dans une solution saline pendant 5 jours. L'observation visuelle et la mesure de la perte de poids ont montré une dégradation plus élevée sur les échantillons de rapport Fe-SS 1:1. Cette étude préliminaire montre que la technique PVD / plasma est une voie possible pour la construction d’une nanostructure de particules de Fe-SS inter-mélangés. Un ratio adéquat de Fe et SS peut former un couple galvanique et ouvrant la voie pour les stents biodégradables. Le travail futur consiste à faire des tests de différents rapports de mélanges de Fe et SS ainsi que des tests électrochimiques / mécaniques des structures résultantes. La projection par plasma : Applications et développements récents Christian Moreau Chaire de recherche du Canada en ingénierie de surface et projection thermique Université Concordia Montréal (Québec), Canada La projection par plasma est un procédé de déposition de revêtements utilisé industriellement pour protéger des composantes contre l’usure, la corrosion, les hautes températures, etc. Dans ce procédé, un arc électrique est utilisé pour former un jet de plasma dont la température excède 10,000K. Le matériau de dépôt est introduit dans ce jet de plasma thermique sous forme de poudres fines. Celles-ci sont fondues, accélérées à haute vitesse par le jet de plasma et projetées sur le substrat où elles se solidifient rapidement formant un revêtement protecteur. Ce procédé de déposition est polyvalent, car il permet de réaliser des revêtements céramiques, métalliques, polymères ou composites sur des composantes de dimensions variant de quelques millimètres à plusieurs mètres. Dans cette présentation, un survol de la technologie sera présenté avec une revue des principales applications industrielles dans les secteurs de l’aérospatiale, l’automobile, l’énergie, etc. Nous aborderons aussi les technologies émergentes de projection par plasma de suspensions et de solutions qui sont l’objet de travaux de recherche importants, car ils permettent de réaliser des dépôts nanostructurés à des taux de l’ordre du kilogramme à l’heure. Energetics of Reactions in a Dielectric Barrier Discharge with Argon Carrier Gas: Esters Bernard Nisol1, Sean Watson1, Sophie Lerouge2, Michael R. Wertheimer1* 1 Groupe des Couches Minces (GCM) and Department of Engineering Physics, Polytechnique Montréal, Box 6079, Station Centre-Ville, Montreal QC, H3C 3A7, Canada 2 Research Centre, Centre Hospitalier de l’Université de Montréal (CRCHUM), and Department of Mechanical Engineering, École de technologie supérieure (ÉTS), Montréal (Qc), Canada *Corresponding author; e-mail: [email protected] A large research reactor for dielectric barrier discharge (DBD) experiments at atmospheric pressure (AP) has been used with argon (Ar) carrier gas under constant plasma conditions (𝑓𝑓 = 20 kHz, 𝑉𝑉a (𝑓𝑓) = 8 kVp-p = 2.8 kVrms). Five esters, acrylates with differing number of unsaturations were used as “monomers”; monomer flows, 𝐹𝐹d , were at ‰ concentrations in the F = 10 standard liters per minute (slm) of argon. We earlier perfected and reported a method for measuring 𝐸𝐸g , the energy dissipated per cycle of the applied a.c. voltage, and ∆𝐸𝐸g , the energy difference with and without monomer in the Ar flow. The latter, combined with 𝐹𝐹d , enable calculation of 𝐸𝐸m , the average energy absorbed from the plasma per monomer molecule. Plots of 𝐸𝐸m versus 𝐹𝐹d and 1/𝐹𝐹d yield much valuable information, for example about the role of C=C and C≡C bonds in fragmentation and polymerization reactions. Fourier-transform infrared (FTIR) spectroscopy, Spectroscopic Ellipsometry (SE) and Scanning Electron Microscopy (FEGSEM) further enhance and complement data interpretation. ABSTRACT Effect of annealing temperature on the structural and optoelectronic properties of pulsed laser deposited of Cu2ZnSnS4 thin films 1,2 Z. Oulad Elhmaidi , R. Pandiyan1, Z. Sekkat3, M. Abd-lefdil2, and M. A. El Khakani1,* 1 Institut National de la Recherche Scientifique, Centre-Énergie, Matériaux et Télécommunications, 1650 Blvd. Lionel–Boulet, C.P. 1020, Varennes, QC J3X-1S2, Canada 2 Materials Physics Laboratory, Faculty of Sciences, University Mohammed V, Rabat, Morocco 3 Optics & Photonics Center, MASCIR, Rabat, Morocco *Email : [email protected] Cu2ZnSnS4 thin films were deposited onto various substrates by using the pulsed KrF-excimer laser deposition (PLD) technique at room temperature (RT). The PLD-deposited Cu2ZnSnS4 films were postannealed at different temperatures (TA) ranging from 200 to 500°C in Argon atmosphere. The physical, chemical and optoelectronic properties of the PLD-deposited films were studied as a function of their TA. The polycrystalline PLD-Cu2ZnSnS4 (CZTS) films were confirmed to crystallize in the kesterite structure with a strong (112) preferred orientation. Their crystallinity was found to improve significantly for TA ≥ 400°C. The mean CZTS crystallite size increased from ~ 7 nm (at RT) to 35 nm (for Ta ≥ 400 °C). The SEM analyses revealed that the as-deposited PLD-CZTS films exhibit a smooth and uniform surface, while the annealed ones (particularly at Ta ≥ 400°C) were found to consist of densely packed small grains, in agreement with the recrystallization revealed by the XRD analyses at higher TA. Consistently, the recrystallization of the CZTS films was also found to lead to increased surface roughness from ~14 nm at RT to 70 nm at TA = 500°C with a value around 40 nm for TA = 300-400°C. The average composition of the PLD-Cu2ZnSnS4 films, as determined from EDX analysis, was found to be nearly stoichiometric (Cu/(Zn+Sn) atomic ratio of 1.0-1.2 and a Zn/Sn ratio of 0.8-0.97) exhibiting Cu-rich and Zn-poor compositions. The analysis of the UV-Vis spectra of the PLD-Cu2ZnSnS4 films permitted to extract their optical bandgap (Eg), of which optimum value of ~1.58 eV was found for those annealed at TA= 300°C. By combining different characterization techniques (i.e., UV-Vis, XPS and UPS analysis), we have experimentally determined relevant optoelectronic parameters (such as the work function, Eg, Valence band maximum, and conduction band minimum) of the PLD-Cu2ZnSnS4 as function of their TA. This enabled us to reconstruct the energy band structure of these PLD-CZTS films and examine their band alignment with buffer layer candidates (CdS and ZnS) for the formation of photovoltaic heterojunctions. ON-CHIP GENERATION OF FOUR-PHOTON ENTANGLED QUBIT STATES Christian Reimer1, Michael Kues1,*, Piotr Roztocki1, Benjamin Wetzel1,2, Brent E. Little3, Sai T. Chu4, Tudor Johnston1, Yaron Bromberg5, Lucia Caspani1,6, David J. Moss7, Roberto Morandotti1,8 1 INRS-EMT, 1650 Boulevard Lionel-Boulet, Varennes, Québec J3X 1S2, Canada; 2Department of Physics and Astronomy, University of Sussex, Falmer, Brighton BN1 9QH, UK; 3State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Science, Xi'an, China; 4City University of Hong Kong, Department of Physics and Material Science, Tat Chee Avenue, Hong Kong, China; 5Racah Institute of Physics, The Hebrew University of Jerusalem, Jerusalem 91904, Israel; 6School of Engineering and Physical Sciences, Heriot-Watt University, SUPA, Edinburgh EH14 4AS, UK; 7Center for Micro-Photonics, Swinburne University of Technology, Hawthorne, Victoria 3122, Australia; 8Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, China Email: [email protected] Abstract— Multi-photon entangled states are highly desired for quantum information processing. However, the generation of multi-partite entangled states is very challenging and usually requires complex and expensive infrastructure. Here, we demonstrate that four-photon entangled qubit states can be generated on a CMOS-compatible chip, opening the door to compact and scalable implementations. We measure fourphoton quantum interference with a visibility above 89%, and quantum state tomography reveals a fidelity above 64%. Keywords—Quantum optics; Integrated Nonlinear optics, four wave-mixing optics devices; The generation of entangled photon states is required for the realization of several quantum protocols, which among others can drastically increase computational speed [1] or enable secure communication [2]. However, the generation of multi-partite entangled states [3] is experimentally very challenging and has not yet been achieved on an integrated platform. A large variety of different integrated quantum sources has been demonstrated [4], including the generation of 3-photon correlations (not yet entangled) [5]. However, until now, no integrated source has generated more than two entangled photons. Here we report the first generation of four-photon entangled states on a photonic chip. For the demonstration of multi-photon entanglement, we use a CMOS-compatible 4-port integrated micro-ring resonator with a free spectral range of 200 GHz, and resonances exhibiting Qfactors of 235,000 (820 MHz resonance bandwidth) [6,7]. An imbalanced phase-stabilized Michelson interferometer was used to generate the double pulses, required for the time-bin entanglement scheme, which relies on the coherent superposition of photon pairs generated in two temporal modes [8]. The double pulses were then coupled into the ring resonator and photon pairs were generated through Spontaneous Four Wave-Mixing (SFWM). This quantum frequency comb emitted entangled photon pairs simultaneously on all frequency modes, symmetrically with respect to the excitation frequency [9]. We first confirmed the generation of qubit entangled 𝟏 Bell states 𝚿𝒔𝒊 = 𝐒𝒔 , 𝐒𝒊 + 𝐋𝒔 , 𝐋𝒊 , generated on all 𝟐 frequency mode pairs around the excitation frequency, where the signal (s) and idler (i) photons are in a quantum superposition of the short (S) and long (L) time-bin. In order to combine these multiple individual Bell states to multi-photon entangled states, the temporal modes of the generated Bell states need to be indistinguishable, which is achieved in our configuration through the equal bandwidths of the resonances. We selected four frequency modes, individually forming two Bell states, and post-select four-fold photon coincidences. The resulting entangled state is given by 𝚿𝟒!𝒑𝒉𝒐𝒕𝒐𝒏 = 𝚿𝟏 ⨂ 𝚿𝟐 = 𝟏 𝐒𝒔𝟏 , 𝐒𝒊𝟏 , 𝐒𝒔𝟐 , 𝑺𝒊𝟐 + 𝑺𝒔𝟏 , 𝐒𝒊𝟏 , 𝐋𝒔𝟐 , 𝐋𝒊𝟐 + 𝐋𝒔𝟏 , 𝐋𝒊𝟏 , 𝐒𝒔𝟐 , 𝐒𝒊𝟐 + 𝑳𝒔𝟏 , 𝐋𝒊𝟏 , 𝐋𝒔𝟐 , 𝐋𝒊𝟐 . We confirm the generation of this four-photon entangled state through four-photon quantum interference with a measured visibility of 89% without background correction. We furthermore performed quantum state tomography, which enabled us to experimentally obtain the density matrix of the generated quantum state. The calculated fidelity of 64% confirms that the measured state is close to ideal, where the measured fidelity is limited by losses and imperfections in the interferometers. 𝟐 Even though the demonstrated multi-photon entangled states are separable, as they are generated from a product of two-photon Bell states, it is conceivable that through the use of multiple excitation fields [10] or controlled phase gates [11], large nonseparable multi-photon entangled states could be constructed. Our results therefore present a significant step towards enabling optical quantum information processing on low-cost photonic chips. I. REFERENCES [1] R. Raussendorf et al., “A one-way quantum computer,” Phys. Rev. Lett. 86, 5188 (2001) [2] [3] H.J. Kimble,“The quantum internet,” Nature 453, 1023 (2008) H.J. Briegel et al., “Persistent entanglement in arrays of interacting particles,” Phys. Rev. Lett. 86, 910 (2001) [4] D. Bonneau et al., “Silicon quantum photonics,” in Silicon Photonics III, L. Pavesi, D.J. Lockwood, Springer, pp. 41-82. [5] S. Krapick et al., “On-chip generation of photon-triplet states,” Opt. Express 24, 2836-2849 (2016) [6] C. Reimer et al., “Integrated frequency comb source of heralded single photons,” Opt. Express 22, 6535 (2014) [7] C. Reimer et al., “Cross-polarized photon-pair generation and bichromatically pumped optical parametric oscillation on a chip,” Nature Commun. 6, 8236 (2015) [8] J. Brendel et al., “Pulsed energy-time entangled twin-photon source for quantum communication,” Phys. Rev. Lett. 82, 2594 (1999) [9] C. Reimer et al., “Generation of multiphoton entangled quantum states by means of integrated frequency combs,” Science 351, 11761180 (2015). [10] M. Chen et al., “Experimental Realization of Multipartite Entanglement of 60 Modes of a Quantum Optical Frequency Comb,” Phys. Rev. Lett. 112, 120505 (2014) [11] G. Vallone et al., “Realization and Characterization of a Two-Photon Four-Qubit Linear Cluster State,“ Phys. Rev. Lett. 98, 1–4 (2007) Conical Nanoantenna Arrays for Terahertz Light A. Rovere*1, A. Toma2, M. Prato2, A. Bertoncini4, A. Cerea2, R. Piccoli1, A. Perucchi3, P. Di Pietro3 F. De Angelis2, L. Manna2, R. Morandotti1, C. Liberale4, L. Razzari1. *[email protected] 1 INRS - EMT, 1650 Blvd Lionel Boulet, J3X 1S2 Varennes (Québec), Canada. Fondazione Istituto Italiano di Tecnologia, via Morego 30, 16163 Genova, Italy. 3 INSTM UdR Trieste-ST, Area Science Park, Basovizza, 34012 Trieste, Italy. 3 KAUST, BESE division, Thuwal 23955-6900, Saudi Arabia. 2 In the last years, plasmonic nanoantennas have been demonstrated to be an effective solution for localizing free-space light well beyond the diffraction limit, leading to a local field enhancement that can be exploited, e.g., for enhanced spectroscopy [1]. In this work, we report a preliminary investigation on the frequency response of 3D gold nanocone arrays resonating at terahertz (THz) frequencies. First, we numerically investigated them, to optimize their near- and far-field frequency response. Then, the fabricated sample have been characterized using broadband synchrotron THz radiation. Experimental results are in good agreement with simulations and show the potential for nanomaterial spectroscopy. [1] Toma A. et al., Nano Letters 15, 386–391 (2015). Integrated Quantum Frequency Comb of Entangled Qubits Piotr Roztocki,1 Christian Reimer,1 Michael Kues,1,* Benjamin Wetzel,1,2 Fabio Grazioso,1 Yaron Bromberg,3 Brent E. Little,4 Sai T. Chu,5 David J. Moss,6 Lucia Caspani,1,7 and Roberto Morandotti1 INRS-EMT, 1650 Boulevard Lionel-Boulet, Varennes, Québec J3X 1S2, Canada; 2Department of Physics and Astronomy, University of Sussex, Falmer, Brighton BN1 9RH, United Kingdom; 3Department of Applied Physics, Yale University, New Haven, Connecticut 06520, USA; 4Xi’an Institute of Optics and Precision Mechanics of CAS, Xi’an, China; 5Department of Physics and Material Science, City University of Hong Kong, Tat Chee Avenue, Hong Kong, China; 6School of Electrical and Computer Engineering, RMIT University, Melbourne, VIC, 3001 Australia 7 School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, United Kingdom *[email protected] 1 Entangled photon pair sources form one of the key building blocks for applications in quantum information processing and computing [1], quantum communication [2], as well as imaging and sensing with resolutions exceeding the classical limit [3]. To deliver the compactness, scalability and efficiency required by future optical quantum circuit devices, solutions focusing on an integrated (on-chip) approach have been recently studied and developed, including integrated quantum circuits, sources and detectors [4]. The use of micro-ring resonators [5,6] with narrow resonances and high Q-factors are of special interest since, in contrast to waveguides, they offer an enhancement in photon pair generation efficiency as well as a narrow photon pair bandwidth, rendering them compatible with quantum optical devices (e.g. high time resolution single photon detectors and quantum memories). More importantly, and in contrast to non-resonant waveguides, where individual photon pairs featured by one signal/idler frequency pair are typically produced, resonant nonlinear cavities such as ring resonators offer the possibility of generating correlated photon pairs on multiple frequency channels [7] due to the periodic and equidistant resonance structure. Here we demonstrate the first simultaneous generation of multiple entangled photons distributed over a quantum frequency comb [8]. We realized the quantum frequency comb using a 4-port integrated micro-ring resonator with a free spectral range of 200 GHz, and resonances exhibiting Q-factors of 235,000 (820 MHz resonance bandwidth). The integrated microring resonator was fabricated in a CMOS-compatible high refractive index silica glass [9]. The experimental setup used a pulsed mode-locked fiber laser (10 MHz repetition rate) to optically pump the resonator. An imbalanced phasestabilized Michelson interferometer was used to generate the double pulses required for the time-bin entanglement scheme, which relies on the coherent superposition of photon pairs generated in the first or second pulse (i.e. first or second time-bin) [10]. The double pulses were then coupled into the ring resonator, where their center frequency was matched with a bandpass filter to a single ring resonance. Due to the high field enhancement and high nonlinearity, photon pairs were generated through SFWM on several frequency channels (corresponding to the ring resonances) symmetrically with respect to the pump frequency [7]. We measured the single photon output spectrum, confirming the ultra broadband nature of the quantum comb, with photon pairs emitted over the full S, C and L telecommunication band. To verify entanglement through quantum interference, we added interferometers with the path length difference matched to the first interferometer. Using coincidence detection, this setup allowed to measure both quantum interference, as well as to perform full quantum state tomography, fully characterizing the entangled photon pairs. We measured interference patterns for 5 different spectral mode couples symmetric to the pump frequency and always measured a visibility above 86% (94% background corrected), violating the Clauser-Horne-Shimony-Holt (Bell-like) inequality (86.9% > 71%≈1/√2) [11], and therefore confirming the observation of time-bin entanglement from our integrated photon pair source. Performing quantum state tomography [12] revealed that generated entangled photon pairs form time-bin entangled qubits with a measured fidelity of above 86% and a purity of 99.9%. In conclusion, we report the first generation of a quantum frequency comb of time-bin entangled photon pairs. The fully integrated device emits high quality entangled qubits over an extremely broadband quantum comb, covering the full S, C and L telecommunication band. The comb is particularly appealing for multi-channel quantum communication, but also for quantum computation, where additional channels increase the information capacity [13]. References [1] P. Walther et al., “Experimental one-way quantum computing,” Nature 434, 169 (2005). [2] H. J. Kimble, “The quantum internet,” Nature 453, 1023 (2008). [3] M. Kolobov, “The spatial behavior of nonclassical light,” Rev. Mod. Phys. 71, 1539 (1999). [4] D. Bonneau et al., “Silicon quantum photonics,” in Silicon Photonics III, L. Pavesi, D.J. Lockwood, Springer, pp. 41-82. [5] D. Grassani et al., “Micrometer-scale integrated silicon source of time-energy entangled photons,” Optica 2, 88 (2015). [6] C. Reimer et al., “Cross-polarized photon-pair generation and bi-chromatically pumped optical parametric oscillation on a chip,” Nature Commun. 6, 8236 (2015). [7] C. Reimer et al., “Integrated frequency comb source of heralded single photons,” Opt. Express 22, 1023 (2014). [8] C. Reimer et al., “Generation of multiphoton entangled quantum states by means of integrated frequency combs,” Science 351(6278), 11761180 (2016). [9] D. J. Moss et al., “New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics,” Nature Photon. 7, 597 (2013). [10] J. Brendel et al., “Pulsed energy-time entangled twin-photon source for quantum communication,” Phys. Rev. Lett. 82, 2594 (1999). [11] J. F. Clauser et al., “Proposed experiment to test local hidden-variable theories,” Phys. Rev. Lett. 23, 880 (1969). [12] D. F. V. James et al., “Measurement of qubits,” Phys. Rev. A. 64, 052312 (2001). [13] P. C. Humphreys et al., “Linear optical quantum computing in a single spatial mode,” Phys. Rev. Lett. 111, 150501 (2013). Coagulation et collage des nanoparticules dans les plasmas Benjamin Santos, François Vidal, Claude Boucher Institut National de la Recherche Scientifique 15 avril 2016 Résumé Dans le présent travail nous présentons les résultats d’un modèle sectionnel d’aérosol sans dépendence spatiale qui tient en compte les mécanismes de coagulation, collage et nucléation des nanoparticules dans un plasma. Notre modèle est inspiré de la recherche du groupe de S. L. Girshick[1, 2, 3] qui ont réussi à modéliser la croissance des nanoparticules dans un modèle 1D pour un réacteur de plasma de silane-argon. L’emploi d’outils numériques s’avère particulièrement pertinent car la mise en place d’expériences est difficile à réaliser dû à la taille nanométrique des particules. Par exemple, notre modèle permet de suivre l’évolution des tailles de particules mais aussi des charges. 16 0 14 12 10 8 4 2 10 12 logn̄ 8 6 q(1/ e) 6 10 14 20 30 6 40 4 50 20.0 10.0 2 dp(nm) F IGURE 1 – Logarithme de la densité moyenne dans chaque section. Références [1] S. J. Warthesen and S. L. Girshick. Numerical simulation of the spatiotemporal evolution of a nanoparticle–plasma system. Plasma Chem Plasma Process, 27(3) :292–310, June 2007. [2] P. Agarwal and S.L. Girshick. Sectional modeling of nanoparticle size and charge distributions in dusty plasmas. Plasma Sources Sci. Technol., 21(5) :055023, October 2012. [3] L. Ravi and S. L. Girshick. Coagulation of nanoparticles in a plasma. Phys. Rev. E, 79(2) :026408, February 2009. Chondroitin sulfate-oriented epidermal growth factor (EGF) coating for random and aligned electrospun vascular grafts Houman Savoji1,2,5, Marion Maire2, Pauline Lequoy2,4, Benoît Liberelle3, Gregory De Crescenzo1,3, Michael R. Wertheimer1,5, Abdellah Ajji1,3, Sophie Lerouge2,4 École Polytechnique de Montréal, Montreal, QC, Canada (1Institute of Biomedical Engineering, 3 2 Department of Chemical Engineering, 5Department of Engineering Physics) Laboratory of Endovascular Biomaterials (LBeV), Research Centre, Centre Hospitalier de l’Université de Montreal (CRCHUM), Montreal, QC, Canada 4 Department of Mechanical Engineering, École de technologie supérieure, Montreal, QC, Canada Introduction: The patency of synthetic small-diameter vascular grafts (SDVG) is limited by the absence of formation of a stable monolayer of endothelial cells (HUVEC) on the lumen, resisting to physiological shear. Electrospinning is an interesting fabrication process which enables to create new SDVG with enhanced compliance and to mimic the morphology of tissues. However cell adhesion and growth remains a problem. The objective here has been to investigate random (R) and aligned (A) electrospun PET (ePET) mats as scaffolds for luminal and media layers with bioactive coatings that improve cell behavior. Methods: (R) and (A) mats were prepared by electrospinning. The mats were then coated with amine-rich plasma coating (LP). Chondroitin sulfate (CS) was covalently grafted, following which epidermal growth factor (EGF) was oriented tethered. The physicochemical properties of the mats were then characterized. The metabolic activity, morphology and infiltration of HUVEC and VSMC were assayed. EC resistance to shear was also studied. Results and Discussion: Significant increase of HUVEC metabolic activity was observed on bioactive coatings (LP+CS) compared with bare mat. These cells formed a confluent monolayer, and their retention was greatly improved on both LP- and LP+CS-coated mats, both (R) and (A), results being better for (A). For the media layer, CS+EGF coatings led to dramatically increased VSMC -growth, -infiltration and -survival in serum-free medium. Conclusion: Combinations of bioactive coatings with ePET mats can provide promising scaffolds for luminal and media layers of SDVGs, ones that greatly improve cell growth, VSMCinfiltration, and HUVEC-resistance to shear. This project was supported by the CIHR and NSERC. HS gratefully acknowledges the award of FRQNT and SVC Foundation scholarships. Broadband detection of THz pulses via silica based solid-state device A. Tomasino1,5, A. Mazhorova1, M. Clerici2, M. Peccianti3, S. P. Ho1,4, L. Razzari1, Y. Jestin1, A. Pasquazi3, A. Markov1, A. Busacca5, J. Ali4, R. Morandotti1 1 INRS-EMT, 1650 Boulevard Lionel-Boulet, Varennes, Québec J3X 1S2, Canada School of Engineering, University of Glasgow, Glasgow, G12 8LT, United Kingdom 3 Department of Physics and Astronomy, University of Sussex, Falmer, Brighton BN1 9RH, United Kingdom 4 Nanophotonics Research Alliance, Universiti Teknologi Malaysia Skudai, Johor, Malaysia 5 DEIM, University of Palermo, Viale delle Science, Palermo, 90128, Italy 2 Terahertz (THz) technology gained significant interest over the last years, mainly due to its unique properties, enabling the development of several applications in biosensing, security, and defense fields. Although highquality and reliable THz sources are available on the market, still there are mainly two techniques suitable for the coherent detection of THz pulses, i.e., Electro-Optic Sampling and Photoconductive Antennas. However, these techniques allow relatively narrowband THz detection, usually below 4 THz, due to absorption and dispersion inside the nonlinear crystals. In order to overcome such a limitation, some broadband coherent detection schemes have been proposed and, among others, the Air Based Coherent Detection (ABCD) technique (0.1 - 20 THz) is still the most employed [1]. It relies on the Terahertz Field Induced Second Harmonic (TFISH) generation process in centrosymmetric media (for example, air). Since THz radiation can be regarded as a static electric field compared to a fast oscillating optical beam, it can break the symmetry of a Kerr medium, thus leading the material to show a quadratic behavior. By applying an external oscillating bias, it is possible to recover the THz waveform. However, the ABCD technique requires bulky optical components and both a high probe power and a high bias voltage (~5 kV) in order to achieve suitable signal-to-noise (SNR) ratios. The proposed device relies on the TFISH effect (similar to the ABCD protocol), exploiting the advantages of the large breakdown voltage and the high nonlinearity of Silica (SiO2). The sample has been fabricated via standard UV lithography, depositing 100-nm thick gold electrodes on a 1-mm thick fused silica substrate (Fig. 1(a)). The gap between the electrodes was filled with a 2 μm-thick layer of SiO2 on the top in order to avoid breakdown in air. Thanks to the micron-size gap, very strong electric fields can be achieved up by applying a bias voltage of few hundreds volts. Different combinations of gold fingers (10, 30, 100 µm) and silica gap sizes (3, 4, 5 µm) were tested. Asymmetric periodic structure has been chosen in order to avoid any destructive interference during detection. The THz waveforms recovered by employing the 3 µm gap, 10 µm finger sample are shown in Fig. 1(b) as a function of the applied voltage biases. The THz signal linearly scales with the applied bias, however a degradation is observed over 500 V. On the other hand, SNR measurements indicated that the optimal operating condition is achieved for a bias voltage equal to 200 V, which is one order of magnitude lower than the value needed for the ABCD case in order to obtain comparable performance, as shown in Fig. 1(c). Our results pave the way to a novel approach towards compact, integrated broadband coherent detectors for THz pulses. Figure 1. (a) Sketch of the micro-slit asymmetric array solid-state THz detector. (b) THz waveforms recovered with the 3 µm gap, 10 µm finger device, in the range 50-600 V applied bias. (c) Comparison between the spectra achieved in the case of the standard ABCD (blue) and proposed solid-state THz detector (red, SS-BCD) technique. References [1] X. Lu and X. C. Zhang, “Balanced terahertz wave air-biased-coherent-detection,” Appl. Phys. Lett. 98, 151111 (2011). Structure et propriétés électriques de couches minces Sm0.6Ndo.4NiO3 épitaxiées Badr Torriss et Mohamed Chaker INRS – Centre Énergie, Matériaux, Télécommunications, Varennes (Canada) Depuis quelques années les isolants de Mott ont suscité une attention particulière de la part de la communauté scientifique, en raison de leurs propriétés physiques exceptionnelles. Parmi ses isolants, les nickelâtes de terres rares dont la formule générale est RNiO3 (R : Cation terre-rare). Ces composés présentent en fonction de la température, un comportement métallique paramagnétique, isolant paramagnétique ou isolant antiferromagnétique [1]. En contrôlant la composition chimique des solutions solides de différents nickelâtes de terres rares, la température de transition métal-isolant TMI peut-être rapprochée de la température ambiante [2], ce qui ouvre la voie à de multiples applications dans le domaine de l’optoélectronique à savoir, les transistors à effet de champs [3], les modulateurs optiques [4] et les fenêtres éco-énergétiques [5]. L’objectif de ce travail est d’étudier l’influence des contraintes d’épitaxie (compressive et tensile) sur les propriétés structurales, morphologiques et électriques des couches minces de la solution solide Sm0.6Nd0.4NiO3 (SNNO) pour lesquelles la température de transition MI est de l’ordre de 313 K. Nous nous sommes concentrés dans un premier temps à établir un lien entre la déformation structurale de la maille et la température de transition MI. Par la suite, les différents mécanismes de conduction par saut dans les couches minces de SNNO élaborées sur différents substrats comme SrLaAlO4, LaAlO3 et SrTiO3 ont été étudiés. Les résultats expérimentaux de variation de la résistivité en fonction de la température de différents films de SNNO révèlent la possibilité de coexistence de plusieurs modes de conduction par saut entre les états localisés à très basse température. [1] [2] [3] [4] [5] M. Medarde, J. Phys.: Condens. Matter 9 1680 (1997). R. D. Sánchez, M. T. Causa, A. Seoane, J. Rivas, F. Rivadulla, M. A.López-Quintela, J. J. Pérez Cacho, J. Blasco, and J. García, J. Solid State Chem. 151, 1 (2000). C. H. Ahn, J.-M. Triscone and J. Mannhart, nature 424, 1015 (2003). Luke A. Sweatlock and Kenneth Diest, Optics Express Vol. 20, Issue 8, 8700-8709 (2012). J. R. Skuza, D. W. Scott, R. M. Mundle, and A. K. Pradhan, Scientific Reports 6, 21040 (2016). Développement de procédés plasmas pour la microélectronique : PECVD double fréquence à injection liquide pulsée et Plasma ALD C. Vallée1, R. Gassilloud2, R. Vallat1,2, F. Piallat3, A. Aoukar1, P. Kowalczyk1,2, P.D. Szkutnik1, P. Noé2, T. Wakrim1, and P. Gonon1 1 Univ. Grenoble Alpes, LTM, CEA-LETI-Minatec, F-38000 Grenoble, France 2 CEA, LETI, Minatec Campus, F-38054 Grenoble, France 3 Altatech Semiconductor, 611 rue Aristide Bergès,38330 Montbonnot-Saint-Martin, France Avec cette présentation nous allons d’abord discuter des évolutions des procédés plasmas et des matériaux élaborés par PECVD et PEALD pour la microélectronique. En effet si pendant de nombreuses années l’amélioration des dispositifs en microélectronique s’est faite via une simple réduction d’échelle des dimensions, depuis le début des années 2000, c’est l’intégration de nouveaux matériaux (tel que HfO 2) et de nouveaux procédés (ALD/PEALD) qui a permis de poursuivre cette amélioration. Les limites technologiques actuelles en terme de dimension imposent aussi de réfléchir à des nouveaux matériaux et procédés permettant de créer des nouveaux dispositifs ou nouvelles architectures (transistor ou mémoire flash 3D, mémoires non-volatiles résistives RRAM ou à changement de phase PCM…).Pour chacun de ces dispositifs un procédé plasma spécifique doit être développé. Suite à cette « introduction » nous présenterons quelques exemples de procédés plasmas développés ces dernières années : - Procédés PECVD avec plasma double fréquence (400 KHz et 13.56 MHz) et injection liquide de précurseurs pour le dépôt du métal TiCN dans un empilement high K/grille métal de transistor CMOS et pour le dépôt confiné de matériaux à changement de phase GeTe ou GeSbTe. Avec ces exemples nous montrerons que l’ajout d’une puissance basse fréquence impacte fortement la densité du plasma et la dissociation des précurseurs. Ceci modifie alors les propriétés du dépôt : vitesse, qualité des couches, capacité à remplir des trous pour un dépôt dans des structures confinées. - Procédé PEALD et PVD pour des mémoires résistives non volatiles RRAM (Memristor) et des dispositifs à variation de capacité (MEMCapacitor ou MemImpedance). Le but ici est d’utiliser les procédés de dépôt plasma pour fabriquer des couches nanométriques d’isolants dont le claquage peut être contrôlé de manière réversible. - Développement d’un procédé PEALD pour le dépôt sélectif d’oxydes. La complexité de la lithographie pour des dimensions nanométriques tend à modifier l’approche Top Down classique du dépôt de matériaux (on dépose dans un trou via un masque ou pleine plaque puis on grave). Le challenge désormais est d’être capable d’avoir une croissance sélective vis-à-vis d’une surface et ainsi un dépôt plasma suivant une approche bottom up. Pour la plupart de ces applications nous montrerons que l’utilisation de la spectroscopie d’émission optique (OES) permet d’optimiser et de comprendre le procédé. Silver Tip Manufacturing for Tip-Enhanced Raman Spectroscopy via Electrochemical Etching Jiawei Zhang1, Gitanjali Kolhatkar1, Julien Plathier1, Andreas Ruediger 1 1 Nanoelectronics-Nanophotonics, INRS-Énergie Matériaux et Télécommunications, 1650 Lionel-Boulet, Varennes, Québec, J3X1S2, Canada Conventional scanning probe microscopy (SPM) offers topography images with a resolution down to nanometer scale, but is limited by its inability to provide chemical and structural information regarding the sample under study. On the other hand, optical spectroscopy methods such as Raman spectroscopy can provide us with abundant chemical and structural information. However, due to its diffraction limit, the sensitivity of Raman spectroscopy is limited to several hundred nanometers. Tip-Enhanced Raman Spectroscopy (TERS), a newly developed characterization technique, combines the virtues of SPM techniques and optical spectroscopy. By utilizing a localized surface plasmon at the apex of a metallic tip, or nanoantenna, the topography can be recorded simultaneously with the Raman spectrum with a spatial resolution down to ~1 nm.1 The core element in TERS is the tip, since it is the source of the enhancement while determining the maximum resolution that can be obtained. However, the utilization of TERS is currently limited by the availability of suitable tips with high enhancement, good stability as well as high reproducibility.2 Silver, with its intrinsic low electric damping, high free electron density, strong localized surface plasmon resonance (LSPR) effect in the visible region, is a promising material for the nanoantenna. However, it is prone to contamination, which limits its usage in TERS. In this work, we propose a new etching recipe, namely a mixture of hydrophosphoric acid (H3PO4) and acetonitrile (C2H3N) to overcome this limitation. The influence of the etching medium concentration on the properties of tips is studied. Besides, with an updated version of a cutoff circuit, we successfully avoid over-etching, a most commonly confronted challenge in tip manufacturing process. We have determined the threshold of cutoff voltage for tips with promising properties by a series of experiments. Up to now, the silver tips made from our recipe show very little or no contamination according to Raman studies, and also give satisfying topography with radii of 100 nm or less. Our work will lead to the development of high quality silver tips for TERS, enabling the chemical and morphological study of a wide variety of materials at the nanoscale. [1] Achim Hartschuh, Angew. Chem. Int. Ed. (2008), 47, 8178 – 8191 [2] Teng-Xiang Huang et al, Anal Bioanal Chem. (2015) 407, 8177–8195 Synthesis of Au and Pt-Au Alloy Nanoparticles Qingzhe Zhang, Zhenhe Xu, Yanlong Liu, Mohamed Chaker*, Dongling Ma* Institut National de la Recherche Scientifique, INRS-Énergie, Matériaux et Télécommunications, 1650 Boulevard Lionel-Boulet, Varennes, Québec J3X 1S2, Canada Au nanoparticles (AuNPs) have attracted increasing attention because of their unique catalytic properties. Their synthesis with the conventional wet-chemistry method will leave some organic ligands on the surface, which can act as barriers between reactants and surface active sites, decreasing their catalytic activities. We report an approach to fabricate “bare and clean” Au NPs by means of pulsed laser ablation in liquid. Furthermore, we extend this method to synthesize Pt-Au alloy NPs. For this purpose, we are now optimizing the laser-target conditions, such as laser fluence as the liquid environment (pH value), to synthesize high surface quality Pt-Au alloy NPs that could be applied for visible-light photodegradation and water-splitting. Key words: Au nanoparticles; Pt-Au alloy nanoparticles; pulsed laser ablation; photodegradation; watersplitting Presenting author’s email: [email protected]